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Displaying records 61 to 70 of 112 records.
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61. Intermittent-Contact Scanning Capacitance Microscopy Imaging and Modeling for Overlay Metrology
Published: 12/31/1998
Authors: Santos D Mayo, Joseph J Kopanski, William F Guthrie
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=27867

62. Limitations of the Calibration Curve Method for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements
Published: 3/1/2000
Authors: Jay F. Marchiando, Joseph J Kopanski, John Albers
Abstract: The calibration or conversion curve method (CCM) refers here to using a database of calculations of the capacitance done for a matrix set of model parameters, such as oxide thickness, uniform dopant density, etc., as one method for interpreting scann ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=8592

63. Limitations of the Calibration Curve Method for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements
Published: 6/1/1999
Authors: Jay F. Marchiando, Joseph J Kopanski, John Albers
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=25730

64. MIS Capacitor Studies on Silicon Carbide Single Crystals: Final Report for May 8, 1989 to November 8, 1989
Series: NIST Interagency/Internal Report (NISTIR)
Published: 7/1/1990
Author: Joseph J Kopanski
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=28845

65. Measurement Science for "More-Than-Moore" Technology Reliability Assessments
Published: 10/12/2012
Authors: Chukwudi Azubuike Okoro, Jungjoon Ahn, Meagan V. Kelso, Pavel Kabos, Joseph J Kopanski, Yaw S Obeng
Abstract: In this paper, we will present an overview of metrology issues and some of the techniques currently under development in our group at NIST, aimed at understanding some of the potential performance limiting issues in such highly integrated systems ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=911714

66. Metrology for Nanosystems and Nanoelectronics Reliability Assessments
Published: 8/20/2012
Authors: Yaw S Obeng, Chukwudi Azubuike Okoro, Joseph J Kopanski
Abstract: The traditional models and techniques for studying reliability in integrated circuits may not be appropriate for nanoelectronics and nanosystems. In this paper, we present an overview of a number of materials and metrology techniques currently un ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=911433

67. Microwave-Based Metrology Platform Development: Application of Broad-Band RF Metrology to Integrated Circuit Reliability Analyses
Published: 5/12/2014
Authors: Lin You, Chukwudi Azubuike Okoro, Jungjoon Ahn, Joseph J Kopanski, Yaw S Obeng
Abstract: In this paper we describe the development of a suite of techniques, based on the application of high frequency electromagnetic waves, to probe material and structural changes in integrated circuits under various external perturbations. We discuss how ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=915367

68. Models for Interpreting Measurements Scanning Capacitance Microscope Measurements
Published: 12/31/1997
Authors: Jay F. Marchiando, J R. Lowney, Joseph J Kopanski
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=28178

69. NIST Accomplishments in Nanotechnology
Series: Special Publication (NIST SP)
Report Number: 1052
Published: 1/1/2006
Authors: Michael T Postek, Joseph J Kopanski, David A Wollman
Abstract: This document includes a list of selected NIST accomplishments in nanotechnology for the period of fiscal years 2004 and 2005.  These accomplishments are grouped into the NNI s Program Component Areas (PCAs), which are defined in the text.   ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823212

70. New Research in Nanotechnology - Nanotechnology Science and Technology Series
Published: 2/19/2011
Authors: Michael T Postek, Joseph J Kopanski, David A Wollman
Abstract: NIST is developing a broad range of nanometrology (measurements) and nanomanufacturing techniques necessary for the successful commercialization of nanotechnology. This book is a compilation of a number of selected NIST accomplishments in nanotechn ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912261



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