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Author: john villarrubia

Displaying records 81 to 88.
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81. Blind Estimation of Tip Geometry from Noisy Images
Series: NIST Interagency/Internal Report (NISTIR)
Report Number: 5752
Published: 11/2/1995
Author: John S Villarrubia
Abstract: Broadening of image features due to non-vanishing tip size is a well-known imaging artifact in scanned probe microscopy (SPM) topographs. This need not be a serious limitation for some types of metrology (e.g. pitch or height), but it is significant ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820828

82. Progress on Accurate Metrology of Pitch, Height, Roughness, and Width Artifacts Using an Atomic Force Microscope
Published: 5/1/1995
Authors: J Schneir, T Mcwaid, Ronald G Dixson, V W. Tsai, John S Villarrubia, Edwin Ross Williams, E Fu
Abstract: NIST personnel visited 23 IC manufacturing companies and equipment suppliers during 1994 to determine semiconductor industry needs for scanned probe metrology. NIST has initiated projects addressing some of the needs identified. When complete, these ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820763

83. Increasing the Value of Atomic Force Microscopy Process Metrology Using a High-Accuracy Scanner, Tip Characterization, and Morphological Image Analysis
Published: 1/1/1995
Authors: J Schneir, John S Villarrubia, T Mcwaid, V W. Tsai, Ronald G Dixson
Abstract: Atomic force microscopes are being used increasingly for process metrology. As a case study, the measurement by atomic force microscope of a soda lime glass optical disk patterned using optical lithography and reactive plasma etching is examined. The ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820816

84. Progress in Tip Modeling
Series: NIST Interagency/Internal Report (NISTIR)
Report Number: 5640
Published: 1/1/1995
Author: John S Villarrubia
Abstract: Progress since the last Industrial Applications of Scanned Probe Microscopy workshop in the estimation of tip geometries for scanned probe microscopes is discussed. A new method which does not require calibration of the tip characterizers has been de ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820783

85. A Study of the Surface Texture of Polycrystalline Phosphor Films Using AFM
Published: 1/1/1994
Authors: Zsolt Revay, J Schneir, D Brower, John S Villarrubia, Joseph Fu, et al
Abstract: Stimulable phosphor thin films are being investigated for use as optical data storage media. We have successfully applied atomic force microscopy (AFM) to the measurement of the surface texture of these films. Determination of the surface texture of ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820709

86. Morphological Estimation of Tip Geometry for Scanned Probe Microscopy
Published: 1/1/1994
Author: John S Villarrubia
Abstract: Morphological constraints inherent in the imaging process limit the possible shapes of the tip with which any given tunneling microscope or atomic force microscope image could have been taken. Broad tips do not produce narrow image protrusions. There ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820725

87. Metrology Standards For Advanced Semiconductor Lithography Referenced to Atomic Spacings and Geometry
Published: 12/31/1993
Authors: E Clayton Teague, Loren W. Linholm, Michael W Cresswell, William B. Penzes, John A Kramar, Fredric Scire, John S Villarrubia, Jay Shi Jun
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=2653

88. Measuring Tip Shape for Instrumented Indentation Using Atomic Force Microscopy
Published: Date unknown
Authors: Mark R VanLandingham, John S Villarrubia, R M Camara
Abstract: Atomic Force Microscopy (AFM) was used to determine the three-dimensional shape of probe tips used for instrumented indentation. AFM images were taken for three probe tips with several different image sizes. The geometry obtained directly from the im ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=860509



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