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Author: john villarrubia
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81. Increasing the Value of Atomic Force Microscopy Process Metrology Using a High-Accuracy Scanner, Tip Characterization, and Morphological Image Analysis
J Schneir, John S Villarrubia, T Mcwaid, V W. Tsai, Ronald G Dixson
Atomic force microscopes are being used increasingly for process metrology. As a case study, the measurement by atomic force microscope of a soda lime glass optical disk patterned using optical lithography and reactive plasma etching is examined. The ...
82. Progress in Tip Modeling
NIST Interagency/Internal Report (NISTIR)
John S Villarrubia
Progress since the last Industrial Applications of Scanned Probe Microscopy workshop in the estimation of tip geometries for scanned probe microscopes is discussed. A new method which does not require calibration of the tip characterizers has been de ...
83. A Study of the Surface Texture of Polycrystalline Phosphor Films Using AFM
Zsolt Revay, J Schneir, D Brower, John S Villarrubia, Joseph Fu, et al
Stimulable phosphor thin films are being investigated for use as optical data storage media. We have successfully applied atomic force microscopy (AFM) to the measurement of the surface texture of these films. Determination of the surface texture of ...
84. Morphological Estimation of Tip Geometry for Scanned Probe Microscopy
John S Villarrubia
Morphological constraints inherent in the imaging process limit the possible shapes of the tip with which any given tunneling microscope or atomic force microscope image could have been taken. Broad tips do not produce narrow image protrusions. There ...
85. Metrology Standards For Advanced Semiconductor Lithography Referenced to Atomic Spacings and Geometry
E Clayton Teague, Loren W. Linholm, Michael W Cresswell, William B. Penzes, John A Kramar, Fredric Scire, John S Villarrubia, Jay Shi Jun
86. Measuring Tip Shape for Instrumented Indentation Using Atomic Force Microscopy
Mark R VanLandingham, John S Villarrubia, R M Camara
Atomic Force Microscopy (AFM) was used to determine the three-dimensional shape of probe tips used for instrumented indentation. AFM images were taken for three probe tips with several different image sizes. The geometry obtained directly from the im ...