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You searched on: Author: john villarrubia

Displaying records 81 to 90 of 93 records.
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81. Tip and Surface Reconstruction in Scanned Probe Microscopy
Published: 1/1/1997
Author: John S Villarrubia
Abstract: The non-vanishing size of tips in scanned probe microscopes (e.g., atomic force microscope or scanning tunneling microscope) results in imaging errors. Correction of these errors requires estimation of the tip shape (tip reconstruction) followed by e ...

82. Electrical Test Structures Replicated in Silicon-on-Insulator Material
Published: 12/31/1996
Authors: Michael W. Cresswell, J. J. Sniegowski, Rathindra Ghoshtagore, Richard A Allen, Loren W. Linholm, John S Villarrubia

83. Electrical Test Structures Replicated in Silicon-On-Insulator Material
Published: 5/1/1996
Authors: Michael W. Cresswell, J Sniegowski, Rathindra Ghoshtagore, Robert Allen, L Linholm, John S Villarrubia
Abstract: Measurements of the linewidths of submicrometer features made by different metrology techniques have frequently been characterized by differences of up to 90 nm. The purpose of the work reported here is to address the special difficulties that this p ...

84. Scanned Probe Microscope Tip Characterization Without Calibrated Tip Characterizers
Published: 3/1/1996
Author: John S Villarrubia
Abstract: In scanned probe microscopy the image is a combination of information from the sample and the tip. In order to reconstruct the true surface geometry, it is necessary to know the actual tip shape. It has been proposed that this shape may be reconstruc ...

85. Progress Towards Accurate Metrology Using Atomic Force Microscopy
Published: 1/1/1996
Authors: T Mcwaid, J Schneir, John S Villarrubia, Ronald G Dixson, V W. Tsai
Abstract: Accurate metrology using atomic force microscopy (AFM) requires accurate control of the tip position, an estimate of the tip geometry, and an understanding of the tip-surface interaction forces. We describe recent progress at NIST towards accurate AF ...

86. Blind Estimation of Tip Geometry from Noisy Images
Series: NIST Interagency/Internal Report (NISTIR)
Report Number: 5752
Published: 11/2/1995
Author: John S Villarrubia
Abstract: Broadening of image features due to non-vanishing tip size is a well-known imaging artifact in scanned probe microscopy (SPM) topographs. This need not be a serious limitation for some types of metrology (e.g. pitch or height), but it is significant ...

87. Progress on Accurate Metrology of Pitch, Height, Roughness, and Width Artifacts Using an Atomic Force Microscope
Published: 5/1/1995
Authors: J Schneir, T Mcwaid, Ronald G Dixson, V W. Tsai, John S Villarrubia, Edwin Ross Williams, E Fu
Abstract: NIST personnel visited 23 IC manufacturing companies and equipment suppliers during 1994 to determine semiconductor industry needs for scanned probe metrology. NIST has initiated projects addressing some of the needs identified. When complete, these ...

88. Increasing the Value of Atomic Force Microscopy Process Metrology Using a High-Accuracy Scanner, Tip Characterization, and Morphological Image Analysis
Published: 1/1/1995
Authors: J Schneir, John S Villarrubia, T Mcwaid, V W. Tsai, Ronald G Dixson
Abstract: Atomic force microscopes are being used increasingly for process metrology. As a case study, the measurement by atomic force microscope of a soda lime glass optical disk patterned using optical lithography and reactive plasma etching is examined. The ...

89. Progress in Tip Modeling
Series: NIST Interagency/Internal Report (NISTIR)
Report Number: 5640
Published: 1/1/1995
Author: John S Villarrubia
Abstract: Progress since the last Industrial Applications of Scanned Probe Microscopy workshop in the estimation of tip geometries for scanned probe microscopes is discussed. A new method which does not require calibration of the tip characterizers has been de ...

90. A Study of the Surface Texture of Polycrystalline Phosphor Films Using AFM
Published: 1/1/1994
Authors: Zsolt Revay, J Schneir, D Brower, John S Villarrubia, Joseph Fu, et al
Abstract: Stimulable phosphor thin films are being investigated for use as optical data storage media. We have successfully applied atomic force microscopy (AFM) to the measurement of the surface texture of these films. Determination of the surface texture of ...

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