NIST logo

Publications Portal

You searched on:
Author: john villarrubia

Displaying records 81 to 86.
Resort by: Date / Title


81. Increasing the Value of Atomic Force Microscopy Process Metrology Using a High-Accuracy Scanner, Tip Characterization, and Morphological Image Analysis
Published: 1/1/1995
Authors: J Schneir, John S Villarrubia, T Mcwaid, V W. Tsai, Ronald G Dixson
Abstract: Atomic force microscopes are being used increasingly for process metrology. As a case study, the measurement by atomic force microscope of a soda lime glass optical disk patterned using optical lithography and reactive plasma etching is examined. The ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820816

82. Progress in Tip Modeling
Series: NIST Interagency/Internal Report (NISTIR)
Report Number: 5640
Published: 1/1/1995
Author: John S Villarrubia
Abstract: Progress since the last Industrial Applications of Scanned Probe Microscopy workshop in the estimation of tip geometries for scanned probe microscopes is discussed. A new method which does not require calibration of the tip characterizers has been de ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820783

83. A Study of the Surface Texture of Polycrystalline Phosphor Films Using AFM
Published: 1/1/1994
Authors: Zsolt Revay, J Schneir, D Brower, John S Villarrubia, Joseph Fu, et al
Abstract: Stimulable phosphor thin films are being investigated for use as optical data storage media. We have successfully applied atomic force microscopy (AFM) to the measurement of the surface texture of these films. Determination of the surface texture of ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820709

84. Morphological Estimation of Tip Geometry for Scanned Probe Microscopy
Published: 1/1/1994
Author: John S Villarrubia
Abstract: Morphological constraints inherent in the imaging process limit the possible shapes of the tip with which any given tunneling microscope or atomic force microscope image could have been taken. Broad tips do not produce narrow image protrusions. There ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820725

85. Metrology Standards For Advanced Semiconductor Lithography Referenced to Atomic Spacings and Geometry
Published: 12/31/1993
Authors: E Clayton Teague, Loren W. Linholm, Michael W Cresswell, William B. Penzes, John A Kramar, Fredric Scire, John S Villarrubia, Jay Shi Jun
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=2653

86. Measuring Tip Shape for Instrumented Indentation Using Atomic Force Microscopy
Published: Date unknown
Authors: Mark R VanLandingham, John S Villarrubia, R M Camara
Abstract: Atomic Force Microscopy (AFM) was used to determine the three-dimensional shape of probe tips used for instrumented indentation. AFM images were taken for three probe tips with several different image sizes. The geometry obtained directly from the im ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=860509



Search NIST-wide:


(Search abstract and keywords)


Last Name:
First Name:







Special Publications:

Looking for a NIST Special Publication (NIST SP Series)? Place the series number and dash in the report number field (Example: 800-) and begin your search.

  • SP 250-XX: Calibration Services
  • SP 260-XX: Standard Reference Materials
  • SP 300-XX: Precision Measurement and Calibration
  • SP 400-XX: Semiconductor Measurement Technology
  • SP 480-XX: Law Enforcement Technology
  • SP 500-XX: Computer Systems Technology
  • SP 700-XX: Industrial Measurement Series
  • SP 800-XX: Computer Security Series
  • SP 823-XX: Integrated Services Digital Network Series