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Author: john villarrubia

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81. Progress in Tip Modeling
Series: NIST Interagency/Internal Report (NISTIR)
Report Number: 5640
Published: 1/1/1995
Author: John S Villarrubia
Abstract: Progress since the last Industrial Applications of Scanned Probe Microscopy workshop in the estimation of tip geometries for scanned probe microscopes is discussed. A new method which does not require calibration of the tip characterizers has been de ...

82. A Study of the Surface Texture of Polycrystalline Phosphor Films Using AFM
Published: 1/1/1994
Authors: Zsolt Revay, J Schneir, D Brower, John S Villarrubia, Joseph Fu, et al
Abstract: Stimulable phosphor thin films are being investigated for use as optical data storage media. We have successfully applied atomic force microscopy (AFM) to the measurement of the surface texture of these films. Determination of the surface texture of ...

83. Morphological Estimation of Tip Geometry for Scanned Probe Microscopy
Published: 1/1/1994
Author: John S Villarrubia
Abstract: Morphological constraints inherent in the imaging process limit the possible shapes of the tip with which any given tunneling microscope or atomic force microscope image could have been taken. Broad tips do not produce narrow image protrusions. There ...

84. Metrology Standards For Advanced Semiconductor Lithography Referenced to Atomic Spacings and Geometry
Published: 12/31/1993
Authors: E Clayton Teague, Loren W. Linholm, Michael W Cresswell, William B. Penzes, John A Kramar, Fredric Scire, John S Villarrubia, Jay Shi Jun

85. Measuring Tip Shape for Instrumented Indentation Using Atomic Force Microscopy
Published: Date unknown
Authors: Mark R VanLandingham, John S Villarrubia, R M Camara
Abstract: Atomic Force Microscopy (AFM) was used to determine the three-dimensional shape of probe tips used for instrumented indentation. AFM images were taken for three probe tips with several different image sizes. The geometry obtained directly from the im ...

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