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You searched on: Author: nhan nguyen

Displaying records 61 to 70 of 78 records.
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61. Spectroscopic Ellipsometry of Ta^d2^0^d5^ On Si, in Ultrathin SiO^d2^ and High-K Materials for ULSI Gate Dielectrics, edited by H. R. Huff, C. A. Richter, M. L. Green, G. Lucovsky, and T. Hattori
Published: 9/1/1999
Authors: Curt A Richter, Nhan V Nguyen, G A Alers
Abstract: In this paper, we present the results of spectroscopic ellipsometry (SE) studies of Ta^d2^0^d5^ films on Si. Based on these results, we have experimentally determined an effective method for analyzing SE measurements of Ta^d2^0^d5^. A set of CVD-gro ...

62. Thin Film Ellipsometry Metrology
Published: 12/31/1998
Authors: P. Durgapal, James R. Ehrstein, Nhan V Nguyen

63. Neutron Reflectometry, X-Ray Reflectometry, and Spectroscopic Ellipsometry Characterization of Thin SiO^d2^ on Si
Published: 10/12/1998
Authors: Joseph A. Dura, Curt A Richter, Charles F. Majkrzak, Nhan V Nguyen

64. Characterization of Thin SiO^d2^ on Si by Spectroscopic Ellipsometry, Neutron Reflectometry, and X-Ray Reflectometry
Published: 7/1/1998
Authors: Curt A Richter, Nhan V Nguyen, Joseph A. Dura, Charles F. Majkrzak
Abstract: We compare the results of neutron reflectometry, x-ray reflectometry, and spectroscopic ellipsometry measurements of a thin oxide film (=10 nm). These methods, which arise from three physically different scattering mechanisms, each determine physic ...

65. Thin-Film Ellipsometry Metrology
Published: 3/1/1998
Authors: P. Durgapal, James R. Ehrstein, Nhan V Nguyen
Abstract: A wide variety of commercial ellipsometers are available in the market today. They all measure the change in the state of polarization of light on reflection, but the techniques adopted vary from instrument to instrument. Further, the models used t ...

66. Thickness Determination of Ultra-Thin SiO^d2^ Films on Si by Spectroscopic Ellipsometry
Published: 12/31/1997
Authors: Nhan V Nguyen, Curt A Richter

67. High-Accuracy Principal-Angle Scanning Spectroscopic Ellipsometry of Semiconductor Interfaces
Published: 12/31/1995
Authors: Nhan V Nguyen, Deane Chandler-Horowitz, Joseph G. Pellegrino, Paul M. Amirtharaj

68. Interface Roughness Induced Changes in the Near-Eo Spectroscopic Behavior of Short-Period GaAs/AlAs Superlattices
Published: 12/31/1994
Authors: Deane Chandler-Horowitz, Joseph G. Pellegrino, Nhan V Nguyen, Paul M. Amirtharaj, S. B. Qadri

69. Determination of the Optical Constants of ZnSe Films by Spectroscopic Ellipsometry
Published: 7/1/1994
Authors: R. Dahmani, L. Salamanca-Riba, Nhan V Nguyen, Deane Chandler-Horowitz, B T Jonker

70. Spectroscopic Ellipsometry Determination of the Properties of the Thin Underlying Strained Si Layer and the Roughness at SiO^d2^/Si Interface
Published: 5/16/1994
Authors: Nhan V Nguyen, Deane Chandler-Horowitz, Paul M. Amirtharaj, Joseph G. Pellegrino

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