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You searched on: Author: christopher meyer

Displaying records 31 to 40 of 44 records.
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31. Characterization of Lightpipe Radiation Thermometers for the NIST Test Bed
Published: 9/1/2000
Authors: Benjamin K Tsai, Christopher W Meyer, Francis John Lovas

32. Calibration of Lightpipe Radiation Thermometers in a RTP Tool at 1000 C
Published: 4/1/2000
Authors: Kenneth Gruber Kreider, D P DeWitt, Christopher W Meyer, Vincent P. Scheuerman
Abstract: We are developing an instrumented calibration wafer for radiometric temperature measurements in rapid thermal processing (RTP) that uses Pt/Pd wire and noble metal thin-film thermocouples that are welded to thin-film pads of Pt. The Pt/Pd wire the ...

33. ITS-90 Calibration of Radiometers Using Wire/Thin-film Thermocouples in the NIST RTP Tool: Experimental Procedures and Results
Published: 12/1/1999
Authors: Christopher W Meyer, D W Allen, D P Dewitt, Kenneth Gruber Kreider, F J Lovas, B Tsai

34. Thermodynamic Temperatures of the Triple Points of Mercury and Gallium and in the Interval 217 to 303 K
Series: Journal of Research (NIST JRES)
Report Number: N/A
Published: 12/1/1999
Authors: Michael R Moldover, S J. Boyes, Christopher W Meyer, A R. Goodwin

35. Chamber Radiation Effects on Calibration of Radiation Thermometers With a Thin-Film Thermocouple Test Wafer
Published: 6/1/1999
Authors: Benjamin K Tsai, D P DeWitt, Francis John Lovas, Kenneth Gruber Kreider, Christopher W Meyer, David W Allen
Abstract: In the semiconductor industry, Rapid Thermal Processing (RTP) utilizes a prescribed temperature-time recipe to silicon wafers undergoing processes such as annealing and oxide film formation. The National Technology Roadmap for Semiconductors (NTRS) ...

36. Non-Uniquenes of the ITS-90 From 13.8033 K to 24.5561 K
Published: 6/1/1999
Authors: Christopher W Meyer, Gregory F Strouse, Weston Leo Tew
Abstract: The International Temperature Scale of 1990 (ITS-90) is defined in the region 3.0 K to 24.5561 K by an interpolating constant volume gas thermometer (ICVGT) that is calibrated at three specified fixed points. From 13.8033 K to 1234.93 K the ITS-90 i ...

37. Primary Acoustic Thermometry From 217 K to 303 K
Published: 4/1/1999
Authors: Michael R Moldover, S J. Boyes, A R. Goodwin, Christopher W Meyer
Abstract: We report new values for the difference (T T^d90^) between Kelvin thermodynamic temperatures T and ITS-90, the International Temperature Scale of 1990. The new data span the range 217 K {less then or equal to} T 303 K with standard uncertainties of ...

38. Thermodynamic Temperatures of the Triple Points of Mercury and Gallium and in the Interval 217 K to 303 K
Series: Journal of Research (NIST JRES)
Published: 2/1/1999
Authors: Michael R Moldover, S J. Boyes, Christopher W Meyer, A R. Goodwin
Abstract: We measured the acoustic resonance frequencies of an argon-filled spherical cavity and the microwave resonance frequencies of the same cavity when evacuated. The microwave data were used to deduce the thermal expansion of the cavity and the acoustic ...

39. A Revised Assessment of Calibration Uncertainties for Capsule Type Standard Platinum and Rhodium-Iron Resistance Thermometers
Series: NIST Interagency/Internal Report (NISTIR)
Report Number: 6138
Published: 3/1/1998
Authors: Weston Leo Tew, Gregory F Strouse, Christopher W Meyer
Abstract: Calibration uncertainties for capsule type standard platinum and rhodium-iron resistance thermometers are reviewed and updated. Calibration procedures, thermometer characteristics, scale realization methods, and measurement techniques are described ...

40. Recent Advances in the Realization and Dissemination of the ITS-90 below 83.8K at NIST
Published: 2/13/1998
Authors: Weston Leo Tew, Christopher W Meyer, Gregory F Strouse, G T. Furukawa

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