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You searched on: Author: christopher meyer

Displaying records 21 to 30 of 41 records.
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21. The NIST Low Temperature ITS-90 Realization and Calibration Facilities
Published: 10/1/2002
Authors: Christopher W Meyer, Weston Leo Tew
Abstract: Two facilities have been constructed at NIST for realizing and maintaining the ITS-90 below 84 K. The first facility is an integrated low temperature realization system that realizes the ITS-90 below 84 K in its entirety and which we refer to as the ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830798

22. Wafer Emissivity Effects on Light Pipe Radiometry in RTP Tools
Published: 5/1/2002
Authors: Kenneth Gruber Kreider, David W Allen, D H Chen, D P DeWitt, Christopher W Meyer, Benjamin K Tsai
Abstract: We investigated the effect of different wafer emissivities and the effect of low emissivity films on RTP wafer temperature measurements using light pipe radiation thermometers (LPRTs). These tests were performed in the NIST RTP test bed. We used a ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830778

23. Effects of Wafer Emissivity on Light-Pipe Rediometry in RTP Tools
Published: 9/1/2001
Authors: Kenneth Gruber Kreider, David W Allen, D H Chen, D P DeWitt, Christopher W Meyer, Benjamin K Tsai
Abstract: We investigated the effect of different wafer emissivities and the effect of low emissivity films on rapid thermal processing (RTP) wafer temperature measurements using lightpipe radiation thermometers (LPRTs). These tests were performed in the NIST ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830751

24. ITS-90 Calibration of Radiation Thermometers for RTP Using Wire/Thin-Film Thermocouples on a Wafer
Published: 6/1/2001
Authors: Christopher W Meyer, D P DeWitt, Kenneth Gruber Kreider, Francis John Lovas, Benjamin K Tsai
Abstract: Light-pipe radiation thermometers (LPRTs) are the sensor system of choice in RTP tools. They can be calibrated against blackbodies with an uncertainty (k=1) less than 0.3 C. In an RTP tool, however, account must be made for wafer emissivity and w ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830687

25. Effects of Extraneous Radiation on the Performance of Lightpipe Radiation Thermometers
Published: 1/1/2001
Author: Christopher W Meyer
Abstract: Experiments were performed to study the influence of irradiation and heating of light pipe radiation thermometers (LPRTs). LPRTs are currently the sensor of choice for temperature measurement in rapid thermal processing. Eight sheathed sapphire ligh ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830732

26. The Kelvin and Temperature Measurements
Series: Journal of Research (NIST JRES)
Published: 1/1/2001
Authors: Billy Wilson Mangum, G T. Furukawa, Kenneth Gruber Kreider, Christopher W Meyer, Dean C Ripple, Gregory F Strouse, Weston Leo Tew, Robert D. Saunders, Bettye C Johnson, Howard W Yoon, Michael R Moldover, Charles E Gibson
Abstract: The International Temperature Scale of 1990 (ITS90) is defined from 0.65 K upwards to the highest temperature measurable by spectral radiation thermometry, the radiation thermometry being based on the Planck radiation law. Part I of this paper descr ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830671

27. Characterization of Lightpipe Radiation Thermometers for the NIST Test Bed
Published: 9/1/2000
Authors: Benjamin K Tsai, Christopher W Meyer, Francis John Lovas
Abstract: For the past decade, lightpipe radiation theromoeters (LPRTs) have become the sensors of choice in rapid thermal processing (RTP) applications because of their non-intrusiveness and ease of use. In this paper, we discuss the importance of proper LPR ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841488

28. Characterization of Lightpipe Radiation Thermometers for the NIST Test Bed
Published: 9/1/2000
Authors: Benjamin K Tsai, Christopher W Meyer, Francis John Lovas
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=905181

29. Calibration of Lightpipe Radiation Thermometers in a RTP Tool at 1000 C
Published: 4/1/2000
Authors: Kenneth Gruber Kreider, D P DeWitt, Christopher W Meyer, Vincent P. Scheuerman
Abstract: We are developing an instrumented calibration wafer for radiometric temperature measurements in rapid thermal processing (RTP) that uses Pt/Pd wire and noble metal thin-film thermocouples that are welded to thin-film pads of Pt. The Pt/Pd wire the ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=831032

30. ITS-90 Calibration of Radiometers Using Wire/Thin-film Thermocouples in the NIST RTP Tool: Experimental Procedures and Results
Published: 12/1/1999
Authors: Christopher W Meyer, D W Allen, D P Dewitt, Kenneth Gruber Kreider, F J Lovas, B Tsai
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=100629



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