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You searched on: Author: christopher meyer

Displaying records 21 to 30 of 39 records.
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21. Effects of Wafer Emissivity on Light-Pipe Rediometry in RTP Tools
Published: 9/1/2001
Authors: Kenneth Gruber Kreider, David W Allen, D H Chen, D P DeWitt, Christopher W Meyer, Benjamin K Tsai
Abstract: We investigated the effect of different wafer emissivities and the effect of low emissivity films on rapid thermal processing (RTP) wafer temperature measurements using lightpipe radiation thermometers (LPRTs). These tests were performed in the NIST ...

22. ITS-90 Calibration of Radiation Thermometers for RTP Using Wire/Thin-Film Thermocouples on a Wafer
Published: 6/1/2001
Authors: Christopher W Meyer, D P DeWitt, Kenneth Gruber Kreider, Francis John Lovas, Benjamin K Tsai
Abstract: Light-pipe radiation thermometers (LPRTs) are the sensor system of choice in RTP tools. They can be calibrated against blackbodies with an uncertainty (k=1) less than 0.3 C. In an RTP tool, however, account must be made for wafer emissivity and w ...

23. Effects of Extraneous Radiation on the Performance of Lightpipe Radiation Thermometers
Published: 1/1/2001
Author: Christopher W Meyer
Abstract: Experiments were performed to study the influence of irradiation and heating of light pipe radiation thermometers (LPRTs). LPRTs are currently the sensor of choice for temperature measurement in rapid thermal processing. Eight sheathed sapphire ligh ...

24. The Kelvin and Temperature Measurements
Series: Journal of Research (NIST JRES)
Published: 1/1/2001
Authors: Billy Wilson Mangum, G T. Furukawa, Kenneth Gruber Kreider, Christopher W Meyer, Dean C Ripple, Gregory F Strouse, Weston Leo Tew, Robert D. Saunders, Bettye C Johnson, Howard W Yoon, Michael R Moldover, Charles E Gibson
Abstract: The International Temperature Scale of 1990 (ITS90) is defined from 0.65 K upwards to the highest temperature measurable by spectral radiation thermometry, the radiation thermometry being based on the Planck radiation law. Part I of this paper descr ...

25. Characterization of Lightpipe Radiation Thermometers for the NIST Test Bed
Published: 9/1/2000
Authors: Benjamin K Tsai, Christopher W Meyer, Francis John Lovas
Abstract: For the past decade, lightpipe radiation theromoeters (LPRTs) have become the sensors of choice in rapid thermal processing (RTP) applications because of their non-intrusiveness and ease of use. In this paper, we discuss the importance of proper LPR ...

26. Characterization of Lightpipe Radiation Thermometers for the NIST Test Bed
Published: 9/1/2000
Authors: Benjamin K Tsai, Christopher W Meyer, Francis John Lovas

27. Calibration of Lightpipe Radiation Thermometers in a RTP Tool at 1000 C
Published: 4/1/2000
Authors: Kenneth Gruber Kreider, D P DeWitt, Christopher W Meyer, Vincent P. Scheuerman
Abstract: We are developing an instrumented calibration wafer for radiometric temperature measurements in rapid thermal processing (RTP) that uses Pt/Pd wire and noble metal thin-film thermocouples that are welded to thin-film pads of Pt. The Pt/Pd wire the ...

28. ITS-90 Calibration of Radiometers Using Wire/Thin-film Thermocouples in the NIST RTP Tool: Experimental Procedures and Results
Published: 12/1/1999
Authors: Christopher W Meyer, D W Allen, D P Dewitt, Kenneth Gruber Kreider, F J Lovas, B Tsai

29. Thermodynamic Temperatures of the Triple Points of Mercury and Gallium and in the Interval 217 to 303 K
Series: Journal of Research (NIST JRES)
Report Number: N/A
Published: 12/1/1999
Authors: Michael R Moldover, S J. Boyes, Christopher W Meyer, A R. Goodwin

30. Chamber Radiation Effects on Calibration of Radiation Thermometers With a Thin-Film Thermocouple Test Wafer
Published: 6/1/1999
Authors: Benjamin K Tsai, D P DeWitt, Francis John Lovas, Kenneth Gruber Kreider, Christopher W Meyer, David W Allen
Abstract: In the semiconductor industry, Rapid Thermal Processing (RTP) utilizes a prescribed temperature-time recipe to silicon wafers undergoing processes such as annealing and oxide film formation. The National Technology Roadmap for Semiconductors (NTRS) ...

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