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You searched on: Author: christopher meyer

Displaying records 21 to 30 of 44 records.
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21. Calibration of Radiation Thermometers in Rapid Thermal Processing Tools Using Si Wafers with Thin Film Thermocouples
Published: 10/1/2003
Authors: Kenneth Gruber Kreider, William Andrew Kimes, Christopher W Meyer, Dean C Ripple, Benjamin K Tsai, D H Chen, D P DeWitt
Abstract: Rapid thermal processing (RTP) tools are currently monitored and controlled with lightpipe radiation thermometers (LPRTs) which have been calibrated with thermocouple instrumented wafers. We have developed a thin-film thermocouple wafer that enables ...

22. A Four-Zone Furnace for Realization of Silver and Gold Freezing Points
Published: 9/1/2003
Authors: Dean C Ripple, K Garrity, Christopher W Meyer
Abstract: Recently, the Thermocouple Calibration Laboratory at the National Institute of Standards and Technology has used sodium heat-pipe furnaces for the realization of ITS-90 freezing points of aluminum, silver, and gold. When using a fixed-point cell moun ...

23. Recent Results of NIST Realizations of the ITS-90 Below 84 K
Published: 1/1/2003
Authors: Weston Leo Tew, Christopher W Meyer
Abstract: The results at NIST of realizations and comparisons of the ITS-90 below 84 K are presented. The 3He and 4He vapor pressure scales (0.65 K to 5.0 K), and the interpolating constant volume gas thermometer (ICVGT) scale (5.0 K to 24.556 K) as realized f ...

24. The NIST Low Temperature ITS-90 Realization and Calibration Facilities
Published: 10/1/2002
Authors: Christopher W Meyer, Weston Leo Tew
Abstract: Two facilities have been constructed at NIST for realizing and maintaining the ITS-90 below 84 K. The first facility is an integrated low temperature realization system that realizes the ITS-90 below 84 K in its entirety and which we refer to as the ...

25. Wafer Emissivity Effects on Light Pipe Radiometry in RTP Tools
Published: 5/1/2002
Authors: Kenneth Gruber Kreider, David W Allen, D H Chen, D P DeWitt, Christopher W Meyer, Benjamin K Tsai
Abstract: We investigated the effect of different wafer emissivities and the effect of low emissivity films on RTP wafer temperature measurements using light pipe radiation thermometers (LPRTs). These tests were performed in the NIST RTP test bed. We used a ...

26. Effects of Wafer Emissivity on Light-Pipe Rediometry in RTP Tools
Published: 9/1/2001
Authors: Kenneth Gruber Kreider, David W Allen, D H Chen, D P DeWitt, Christopher W Meyer, Benjamin K Tsai
Abstract: We investigated the effect of different wafer emissivities and the effect of low emissivity films on rapid thermal processing (RTP) wafer temperature measurements using lightpipe radiation thermometers (LPRTs). These tests were performed in the NIST ...

27. ITS-90 Calibration of Radiation Thermometers for RTP Using Wire/Thin-Film Thermocouples on a Wafer
Published: 6/1/2001
Authors: Christopher W Meyer, D P DeWitt, Kenneth Gruber Kreider, Francis John Lovas, Benjamin K Tsai
Abstract: Light-pipe radiation thermometers (LPRTs) are the sensor system of choice in RTP tools. They can be calibrated against blackbodies with an uncertainty (k=1) less than 0.3 C. In an RTP tool, however, account must be made for wafer emissivity and w ...

28. Effects of Extraneous Radiation on the Performance of Lightpipe Radiation Thermometers
Published: 1/1/2001
Author: Christopher W Meyer
Abstract: Experiments were performed to study the influence of irradiation and heating of light pipe radiation thermometers (LPRTs). LPRTs are currently the sensor of choice for temperature measurement in rapid thermal processing. Eight sheathed sapphire ligh ...

29. The Kelvin and Temperature Measurements
Series: Journal of Research (NIST JRES)
Published: 1/1/2001
Authors: Billy Wilson Mangum, G T. Furukawa, Kenneth Gruber Kreider, Christopher W Meyer, Dean C Ripple, Gregory F Strouse, Weston Leo Tew, Robert D. Saunders, Bettye C Johnson, Howard W Yoon, Michael R Moldover, Charles E Gibson
Abstract: The International Temperature Scale of 1990 (ITS90) is defined from 0.65 K upwards to the highest temperature measurable by spectral radiation thermometry, the radiation thermometry being based on the Planck radiation law. Part I of this paper descr ...

30. Characterization of Lightpipe Radiation Thermometers for the NIST Test Bed
Published: 9/1/2000
Authors: Benjamin K Tsai, Christopher W Meyer, Francis John Lovas
Abstract: For the past decade, lightpipe radiation theromoeters (LPRTs) have become the sensors of choice in rapid thermal processing (RTP) applications because of their non-intrusiveness and ease of use. In this paper, we discuss the importance of proper LPR ...

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