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Author: christopher meyer

Displaying records 11 to 20 of 37 records.
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11. ITS-90 Non-Uniqueness From PRT Subrange Inconsistencies Over the Range 24.56 K to 273.16 K
Published: 9/1/2006
Authors: Christopher W Meyer, Weston Leo Tew
Abstract: Calculations have been performed to study ITS-90 non-uniqueness over the range 24.5561 K to 273.16 K, where the scale is defined by an interpolating platinum resistance thermometer (PRT) that is calibrated via sets of defined fixed points. Over this ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830960

12. Temperature Measurements of Microhotplates Using Fluorescence Thermometry
Published: 3/1/2006
Authors: Christopher W Meyer, Douglas C Meier, Christopher B Montgomery, Stephen Semancik
Abstract: A fluorescence microscope has been constructed for measuring surface temperatures of microhotplate platforms. The microscope measures temperature-dependent fluorescence lifetimes of a film of the phosphor Mg4(F)GeO6:Mn which is deposited on the micr ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830927

13. CCT Key Comparison No 1 (CCT-K1): Realisations of the ITS-90, 0.65 K to 24.5561 K, Using Rhodium-Iron Resistance Thermometers
Published: 6/1/2004
Authors: R L Rusby, Christopher W Meyer, Weston Leo Tew, D I Head, K D Hill, O Tamura, P A. de Groot, B Fellmuth, A Storm, A Peruzzi, J Engert, D N Astrov, Y Dedikov, G A Kytin
Abstract: At its meeting in 1996 the CCT initiated five Key Comparisons to test the equivalence of realisations of the ITS-90 between National Measurement Institutes. CCT-K1 covers the temperature range from 0.65 K to 24.5561 K, in which the ITS-90 is defined ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830884

14. Calibration of Radiation Thermometers in Rapid Thermal Processing Tools Using Si Wafers with Thin Film Thermocouples
Published: 10/1/2003
Authors: Kenneth Gruber Kreider, William Andrew Kimes, Christopher W Meyer, Dean C Ripple, Benjamin K Tsai, D H Chen, D P DeWitt
Abstract: Rapid thermal processing (RTP) tools are currently monitored and controlled with lightpipe radiation thermometers (LPRTs) which have been calibrated with thermocouple instrumented wafers. We have developed a thin-film thermocouple wafer that enables ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830794

15. A Four-Zone Furnace for Realization of Silver and Gold Freezing Points
Published: 9/1/2003
Authors: Dean C Ripple, K Garrity, Christopher W Meyer
Abstract: Recently, the Thermocouple Calibration Laboratory at the National Institute of Standards and Technology has used sodium heat-pipe furnaces for the realization of ITS-90 freezing points of aluminum, silver, and gold. When using a fixed-point cell moun ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830843

16. Recent Results of NIST Realizations of the ITS-90 Below 84 K
Published: 1/1/2003
Authors: Weston Leo Tew, Christopher W Meyer
Abstract: The results at NIST of realizations and comparisons of the ITS-90 below 84 K are presented. The 3He and 4He vapor pressure scales (0.65 K to 5.0 K), and the interpolating constant volume gas thermometer (ICVGT) scale (5.0 K to 24.556 K) as realized f ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830804

17. The NIST Low Temperature ITS-90 Realization and Calibration Facilities
Published: 10/1/2002
Authors: Christopher W Meyer, Weston Leo Tew
Abstract: Two facilities have been constructed at NIST for realizing and maintaining the ITS-90 below 84 K. The first facility is an integrated low temperature realization system that realizes the ITS-90 below 84 K in its entirety and which we refer to as the ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830798

18. Wafer Emissivity Effects on Light Pipe Radiometry in RTP Tools
Published: 5/1/2002
Authors: Kenneth Gruber Kreider, David W Allen, D H Chen, D P DeWitt, Christopher W Meyer, Benjamin K Tsai
Abstract: We investigated the effect of different wafer emissivities and the effect of low emissivity films on RTP wafer temperature measurements using light pipe radiation thermometers (LPRTs). These tests were performed in the NIST RTP test bed. We used a ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830778

19. Effects of Wafer Emissivity on Light-Pipe Rediometry in RTP Tools
Published: 9/1/2001
Authors: Kenneth Gruber Kreider, David W Allen, D H Chen, D P DeWitt, Christopher W Meyer, Benjamin K Tsai
Abstract: We investigated the effect of different wafer emissivities and the effect of low emissivity films on rapid thermal processing (RTP) wafer temperature measurements using lightpipe radiation thermometers (LPRTs). These tests were performed in the NIST ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830751

20. ITS-90 Calibration of Radiation Thermometers for RTP Using Wire/Thin-Film Thermocouples on a Wafer
Published: 6/1/2001
Authors: Christopher W Meyer, D P DeWitt, Kenneth Gruber Kreider, Francis John Lovas, Benjamin K Tsai
Abstract: Light-pipe radiation thermometers (LPRTs) are the sensor system of choice in RTP tools. They can be calibrated against blackbodies with an uncertainty (k=1) less than 0.3 C. In an RTP tool, however, account must be made for wafer emissivity and w ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830687



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