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Author: eric lin

Displaying records 171 to 180 of 197 records.
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171. Small-Angle Neutron Scattering Measurements of Nanoscale Lithographic Features
Published: 12/1/2000
Authors: Wen-Li Wu, Eric K Lin, Q Lin, M Angelopoulos
Abstract: The continuing decrease in feature sizes in the semiconductor and other nanofabriation industries has placed increasingly stringent demands on current microscopy-based techniques to precisely measure both the critical dimensions and the quality (i.e. ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=851751

172. A Three-Phase Model for the Structure of Porous Thin Films Determined by X-Ray Reflectivity and Small Angle Neutron Scattering
Published: 4/1/2000
Authors: Wen-Li Wu, Eric K Lin, C Jin, J T Wetzel
Abstract: A methodology to characterize nanoporous thin films based on a novel combination of high resolution specular x-ray reflectivity and small angle neutron scattering has been advanced to accommodate heterogeneities within the material surrounding nanosc ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=851720

173. Properties of Nanoporous Silica Thin Films Determined by High-Resolution X-Ray Reflectivity and Small-Angle Neutron Scattering
Published: 2/1/2000
Authors: Wen-Li Wu, William E Wallace III, Eric K Lin, G W Lynn, Charles J. Glinka, E T Ryan, H M Ho
Abstract: A new methodology based on a novel combination of a high-resolution specular x-ray reflectivity and small-angle neutron scattering has been developed to evaluate the structural properties of low-dielectric-constant porous silica thin films about one ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=851582

174. Investigation of N2 Plasma Effects on the Depth Profile of Hydrogen Silsesquioxane Thin Films Using High Resolution Specular X-Ray Reflectivity
Published: 1/1/2000
Authors: V. J. Lee, Eric K Lin, J K Lan, Y L Cheng, H C Liou, Wen-Li Wu, Y L Wang, M S Feng, C G Chao
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=853664

175. Neutron reflectivity Measurements of Molecular Mass Effects on Polymer Mobility near the Polymer/Solid Interface
Published: 1/1/2000
Authors: Eric K Lin, D J Pochan, Wen-Li Wu, Sushil K Satija
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=853663

176. Small-Angle Neutron Scattering Measurements for the Characterization of Lithographically Prepared Structures
Published: 1/1/2000
Authors: Wen-Li Wu, Eric K Lin, Q Lin, M Angelopolous
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=853678

177. Structural Evolution of Silsesquioxane-based Organic/Inorganic Nanocomposite Networks
Published: 1/1/2000
Authors: Christopher L Soles, Eric K Lin, Wen-Li Wu, C X Zhang, R M Laine
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=853670

178. Structure and Property Characterization of Low-k Dielectric Porous Thin Films Determined by X-ray Reflectivity and Small-Angle Neutron Scattering
Published: 1/1/2000
Authors: Eric K Lin, V. J. Lee, Barry J. Bauer, Haonan Wang, J T Wetzel, Wen-Li Wu
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=853662

179. Shear Induced Polymer Melt Desorption From an Attractive Substrate
Published: 6/24/1999
Authors: Eric K Lin, R Kolb, Wen-Li Wu, Sushil K Satija
Abstract: Shear induced adsorption/desorption of a highly entangled polymer melt from an attractive interface was directly observed using neutron reflectometry. The concentration of poly(methyl methacrylate) (d-PMMA) in a hydrogenated PMMA matrix was measured ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=851465

180. Reduced Polymer Mobility Near the Polymer Solid Interface as Measured by Neutron Reflectivity
Published: 6/1/1999
Authors: Eric K Lin, R Kolb, Sushil K Satija, Wen-Li Wu
Abstract: Neutron reflectometry is used to measure the rate of interdiffusion over distances less than 200 between bilayer samples of deuterated and hydrogenated poly(methyl methacrylate) (PMMA) films with the polymer-polymer interface located near the nativ ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=851729