Take a sneak peek at the new NIST.gov and let us know what you think!
(Please note: some content may not be complete on the beta site.).

View the beta site
NIST logo

Publications Portal

You searched on: Author: zachary levine

Displaying records 91 to 100 of 120 records.
Resort by: Date / Title

91. X-Ray Tomography of Integrated Circuit Interconnects: Past and Future
Published: 11/1/2001
Author: Zachary H Levine
Abstract: An Al-W-silica integrated circuit interconnect sample was thinned to several micro {mu} and scanned across a 200 nm focal spot of a Fresnel zone plate operating at photon energy of 1573 eV. The experiment was performed on beamline 2-ID-B of the Adva ...

92. Tomography of Integrated Circuit Interconnects
Published: 10/1/2001
Authors: Zachary H Levine, A R Kalukin, M Kuhn, S P Frigo, I McNulty, C C Retsch, Y Wang, Uwe Arp, Thomas B Lucatorto, Bruce D Ravel, Charles S Tarrio
Abstract: 00 Word summary based on the paper:Z. H. Levine, A. R. Kalukin, M. Kuhn, S. P. Frigo, I. McNulty,>C. C. Retsch, Y. Wang, U. Arp, T. B. Lucatorto, B. D. Ravel, and C. Tarrio,>``Microtomography of Integrated Circuit Interconnect with an> Electromigra ...

93. Minizing Spatial-Dispersion-Induced Birefringence in Crystals Used for Precision Optics by Using Mixed Crystals of Materials With the Opposite Sign of the Birefringence
Published: 7/31/2001
Authors: John H. Burnett, Zachary H Levine, Eric L Shirley
Abstract: We recently measured and calculated an intrinsic birefringence in CaF^d2^ and BaF^d2^ cubic crystals in the ultraviolet (UV). These results present serious problems for use fo these crystalline materials for precision optics in the UV, e.g., for UV ...

94. Accurate Pattern Registration for Integrated Circuit Tomography
Published: 7/1/2001
Authors: Zachary H Levine, S Grantham, S Neogi, S P Frigo, I McNulty, C C Retsch, Y Wang, Thomas B Lucatorto
Abstract: As part of an effort to develop high resolution microtomography for engineered structures, a two-level copper integrated circuit interconnect was imaged using 1.83 keV x-rays at 14 angles employing a full-field Fresnel zone plate microscope. A major ...

95. AnEig: A Routine to Calculate the Eigenvalues and Eigenvectors of a Tensor Related to the Spatial Dispersion of Birefringence
Published: 6/1/2001
Author: Zachary H Levine
Abstract: A Fortran Subroutine and Mathematica function are given which calculate the eigenvalues and eigenvectors of a tensor which gives the anisotropy of the optical response in cubic crystals.

96. Accurate pattern registration for integrated circuit tomography
Published: 1/1/2001
Authors: Zachary H Levine, Steven E Grantham, S Neogi, S P Frigo, I McNulty, C C Retsch, Ying-ju Wang, Thomas B Lucatorto

97. Intrinsic Birefringence in Calcium Fluoride and Barium Fluoride
Published: 1/1/2001
Authors: John H. Burnett, Zachary H Levine

98. Intrinsic Birefringence of Calcium Fluoride
Published: 1/1/2001
Authors: John H. Burnett, Zachary H Levine, Eric L Shirley

99. Intrinsic birefringence in cubic crystals: a new concern for lithography
Published: 1/1/2001
Authors: J H Burnett, Zachary H Levine, Eric L Shirley

100. Calibration of High-Resolution X-Ray Tomography With Atomic Force Microscopy
Series: Journal of Research (NIST JRES)
Published: 11/1/2000
Authors: A R Kalukin, B Winn, S S Wang, C Jacobsen, Zachary H Levine, Joseph Fu
Abstract: For two-dimensional x-ray imaging of thin films, the technique of scanning transmission x-ray miscroscopy (STXM) has achieved images with feature sizes as small as 40 nm in recent years. However, calibration of three-dimensional tomographic images t ...

Search NIST-wide:

(Search abstract and keywords)

Last Name:
First Name:

Special Publications:

Looking for a NIST Special Publication (NIST SP Series)? Place the series number and dash in the report number field (Example: 800-) and begin your search.

  • SP 250-XX: Calibration Services
  • SP 260-XX: Standard Reference Materials
  • SP 300-XX: Precision Measurement and Calibration
  • SP 400-XX: Semiconductor Measurement Technology
  • SP 480-XX: Law Enforcement Technology
  • SP 500-XX: Computer Systems Technology
  • SP 700-XX: Industrial Measurement Series
  • SP 800-XX: Computer Security Series
  • SP 823-XX: Integrated Services Digital Network Series