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Author: terrence jach

Displaying records 11 to 20 of 30 records.
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11. Grazing Incidence X-Ray Photoemission Spectroscopy and the Accuracy of Thickness Measurements of CMOS Gate Dielectrics
Published: 8/1/2001
Authors: Terrence J Jach, E Landree
Abstract: Grazing incidence x-ray photoelectron spectroscopy (GIXPS) is a method that offers promise as a non-destructive technique to measure the thickness and chemical state of ultrathin gate dielectric films. This method utilizes the non-linear dependence o ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=831227

12. Bulk and Surface Evidence for the Long Range Spatial Modulation of X-Ray Absorption in the AlPdMn Quasicrystal at Bragg Incidence
Published: 1/1/2001
Authors: G Cappello, A Dechelette, F Schmithusen, S Decossas, J Chevrier, F Comin, V Formoso, M. De Boissieu, Terrence J Jach, R. Colella, T Lograsso, C Jenks, D W Delaney
Abstract: An X-ray standing waves experiment was performed at the ID32 beam line of the ESRF on an Al-PD-Mn quasicrystal with the X-ray beam at normal incidence. The X-ray photoemission core levels for each element were recorded to probe the surface. The dra ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=831152

13. Characterization of Silicon-Oxynitride Dielectric Thin Films Using Grazing Incidence X-ray Photoelectron Spectroscopy
Published: 1/1/2001
Authors: E Landree, Terrence J Jach, D Brady, A. Karamcheti, J Canterbury, W Chism, A C Diebold
Abstract: To achieve the future goals for logic device dielectric film thickness and composition metrology, a set of well-characterized calibration reference material standards are needed for validating real-time diagnostic techniques used during production. ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=831214

14. Quasicrystal Element Correlations From X-Ray Standing Waves
Published: 1/1/2001
Author: Terrence J Jach
Abstract: X-ray standing waves associated with dynamical diffraction in perfect crystals are also present during diffraction in high-quality quasicrystals. The fluorescence observed from quasicrystals while scanning the rocking curve of a particular Bragg refl ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=831144

15. Silicon Oxynitride Film Thickness Measurements Using HRTEM and Grazing Incidence X-Ray Photoelectron Spectroscopy (GIXPS)
Published: 8/1/2000
Authors: J H J Scott, E Landree, Terrence J Jach, Eric S Windsor
Abstract: The ability to accurately and precisely measure the thickness of ultrathin ({proportional to} 3nm) dielectric films, used as gate dielectrics in integrated circuits, is critical to the continued success of the semiconductor manufacturing industry. U ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=831174

16. Fast Imaging of Hard X-Rays With a Laboratory Microscope
Published: 7/1/2000
Authors: A S Bakulin, S M Durbin, Terrence J Jach, J Pedulla
Abstract: An improved x-ray microscope with a fully electronic CCD detector system has been constructed that allows improved laboratory-based microstructural investigations of materials with hard x-rays. It uses the Kirkpatrick-Baez multilayer mirror design t ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=831164

17. Grazing Incidence X-Ray Photoemission Spectroscopy of Silicon Oxy-Nitride Ultrathin Films
Published: 2/1/2000
Authors: E Landree, Terrence J Jach
Abstract: Grazing incidence X-ray photoemission spectroscopy (GIXPS) can be used to obtain both chemical and structural information to describe the depth profile for a given ultrathin film. This work describes the use of GIXPS to characterize thethickness of a ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=831182

18. Micro X-Ray Fluorescence of Particles Using a Laboratory X-Ray Source and Capillary Optics
Published: 10/1/1999
Authors: J R. Swider, Terrence J Jach, Eric B Steel
Abstract: We are developing a micro X-ray fluorescence (micro-XRF) instrument that combines a polycapillary optic with a standalone X-ray tube. The optic transmits and focuses an X-ray beam down to 50 {mu}m fwhm. The tight resolution is enhanced by a signifi ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=831107

19. Micro X-Ray Fluorescence of Particles Using a Laboratory X-Ray Tube and a Polycapillary Optic
Published: 8/1/1999
Authors: J R. Swider, Terrence J Jach, Eric B Steel
Abstract: To create a microanalysis instrument that has low detection limits and can spatially resolve elemental distributions, we have utilized the benefits of X-ray Fluorescence (XRF) with a capillary focusing optic of the many methods used for x-ray focusin ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=831203

20. Dynamical Diffraction and X-Ray Standing Waves from Atomic Planes Normal in a Twofold Symmetry Axis of the Quasicrystal A1PdMn
Published: 4/1/1999
Authors: Terrence J Jach, Yanbao Zhang, R. Colella, M. De Boissieu, M. Boudard, A. I. Goldman, T Lograsso, D W Delaney, S. Kycia
Abstract: We have observed dynamical diffraction in the [024024] and[046046] reflections of the icosahedral quasicrystal A1PdMn in the back-reflection geometry ({theta}^dB^ = 90 ). The x-ray fluorescence from the Al and Pd atoms exhibits strong standing w ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=831075



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