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Author: ulf griesmann

Displaying records 21 to 30 of 49 records.
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21. Three-Flat Test Solutions based on Simple Mirror Symmetry
Published: 8/1/2006
Author: Ulf Griesmann
Abstract: Three-flat tests are the archetypes of measurement procedures used in interferometric surface and wavefront metrology to separate errors in the interferometer reference wavefront from errors due to the tests part surface, so-called absolute tests. A ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822358

22. Form-Profiling of Optics Using the Geometry Measuring Machine and NIST M-48 CMM
Published: 1/1/2006
Authors: Nadia Machkour-Deshayes, John Richard Stoup, John Lu, Johannes A Soons, Ulf Griesmann, Robert S. Polvani
Abstract: We are developing an instrument, the Geometry Measuring Machine (GEMM), to measure the profile errors of aspheric and free form optical surfaces, which require measurement uncertainties near 1nm. Using GEMM, an optical profile is reconstructed from ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822545

23. Mini-Fizeau Interferometer for Curvature Sensing in the NIST Geometry Measuring Machine
Published: 1/1/2006
Authors: Quandou Wang, Ulf Griesmann
Abstract: We describe the design of a miniature Fizeau interferometer, which is intended to be an accurate curvature sensor for the NIST Geometry Measuring (GEMM), which is used to measure aspheric and free form surfaces. The interferometer was designed for s ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822280

24. Uncertainties in Aspheric Profile Measurements with the Geometry Measuring Machine at NIST
Published: 7/31/2005
Authors: Ulf Griesmann, Nadia Machkour-Deshayes, Byoung Chang Kim, Quandou Wang, Lahsen Assoufid
Abstract: The Geometry Measuring Machine (GEMM) of the National Institute of Standards and Technology (NIST) is a profilometer for free-form surfaces. A profile is reconstructed from local curvature of a test part surface, measured at several locations along ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822308

25. Interferometric Thickness Calibration of 300mm Silicon Wafers
Published: 7/20/2005
Authors: Quandou Wang, Ulf Griesmann, Robert S. Polvani
Abstract: The Improved Infrared Interferometer (IR3) at the National Institute of Standards and Technology (NIST) is a phase-measuring interferometer, operating at a wavelength of 1550 nm, which is being developed for measuring the thickness and thickness vari ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822291

26. Optical Flatness Metrology for 300 mm Silicon Wafers
Published: 4/1/2005
Authors: Ulf Griesmann, Quandou Wang, T D Raymond
Abstract: At the National Institute of Standards and Technology (NIST), we are developing two interferometric methods for measuring the thickness variation and flatness of free-standing and chucked silicon wafers with diameters up to 300mm. The eXtremely accu ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822272

27. A Simple Ball Averager for Reference Sphere Calibrations
Published: 1/1/2005
Authors: Ulf Griesmann, Quandou Wang, Johannes A Soons, Remi Carakos
Abstract: When measuring the form errors of precision optics with an interferometer, the calibration of the reference wavefront is of central importance.  Ball averaging, or random ball testing, has in recent years emerged as a robust method for calibrati ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822303

28. Modal Reconstruction of Aspheric Surfaces from Experimental Second Derivatives
Published: 1/1/2005
Authors: Nadia Machkour-Deshayes, Ulf Griesmann, Byoung Chang Kim
Abstract: A method for the measurement of precise aspheric optical surfaces based on measurements of the second derivatives of the surface is evaluated. A compact phase-measuring interferometer is used to determine the second derivatives of a surface on a sur ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822079

29. Characterization of Precision Spheres With XCALIBIR
Published: 1/1/2004
Authors: Ulf Griesmann, Johannes A Soons, Quandou Wang
Abstract: The geometry of a nearly spherical surface, for example that of a precision optic, is completely determined by the radius-of-curvature at one point and the deviation from the perfect spherical form at all other points of the sphere. Measurements of ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822216

30. Measuring Form and Radius of Spheres With Interferometry
Published: 1/1/2004
Authors: Quandou Wang, Johannes A Soons, Ulf Griesmann
Abstract: The geometry of a nearly spherical surface, for example that of a precision optic, is completely determined by the radius of curvature at one point and deviation from the perfect spherical form at all other points of the sphere. Measurements of radi ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822167



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