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Author: thomas germer

Displaying records 131 to 140 of 159 records.
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131. Polarized Light Scattering Measurements of Roughness, Subsurface Defects, Particles, and Dielectric Layers on Silicon Wafers, ed. by F. Obelleiro, J.L. Rodr{iacute}guez, and T. Wriedt
Published: 1/1/1999
Authors: Thomas Avery Germer, L Sung

132. Polarized Light-Scattering Measurements of Dielectric Spheres upon a Silicon Surface
Published: 1/1/1999
Authors: L Sung, G W Mulholland, Thomas Avery Germer

133. The Three Components of Reflection
Published: 10/1/1998
Authors: Edward D. Kelley, George R Jones, Thomas Avery Germer

134. Polarization of Out-of-Plane Optical Scatter From SiO^d2^ Films Grown on Photolithographically-Generated Microrough Silicon
Published: 7/1/1998
Authors: Thomas Avery Germer, B W Scheer
Abstract: Bi-directional ellipsometry results are presented for scatter from SiO^d2^ films grown on photolithographically produced microrough silicon surfaces. The principle direction of the polarization and the degree of linear polarization for scatter direc ...

135. Display Reflectance Model Based on the BRDF
Published: 6/1/1998
Authors: Edward D. Kelley, George R Jones, Thomas Avery Germer
Abstract: Many flat panel displays (FPDs) permit anti-reflection surface treatments that differ in character from those of traditional cathode-ray-tube displays. Specular reflection models (mirror-like, producing a distinct image) combined with diffuse (Lambe ...

136. Application of Bidirectional Ellipsometry to the Characterization of Roughness and Defects in Dielectric Layers
Published: 4/1/1998
Author: Thomas Avery Germer
Abstract: The polarization of light scattered into directions out of the plane of incidence is calculated for microroughness, defects, or particles in or near a dielectric film on a substrate. The theories for microroughness and Rayleigh scatter in the presen ...

137. Polarized Light Scattering and its Application to Microroughness, Particle, and Defect Detection
Published: 3/1/1998
Author: Thomas Avery Germer
Abstract: In this paper, I will discuss the theory and application of polarized light scatter. Recent measurements have shown that some sources of scatter, including microroughness and subsurface defects, have well-defined polarizations for any specific pair ...

138. Application of bidirectional ellipsometry to the characterization of roughness and defects in dielectric layers, ed. by J. C. Stover
Published: 1/1/1998
Author: Thomas Avery Germer

139. Display Reflectance Model Based on the BRDF
Published: 1/1/1998
Authors: E F Kelley, G R Jones, Thomas Avery Germer

140. Polarization of out-of-plane optical scatter from SiO^d2^ films grown on photolithographically-generated microrough silicon, ed. by Z.H. Gu and A.A. Maradudin
Published: 1/1/1998
Authors: Thomas Avery Germer, B W Scheer

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