NIST logo

Publications Portal

You searched on: Author: roy geiss

Displaying records 21 to 30 of 45 records.
Resort by: Date / Title

21. Microstructure of 100 nm damascene copper overburden and lines studied by electron backscatter diffraction
Published: 8/6/2007
Authors: Roy H. Geiss, David Thomas Read
Abstract: A detailed understanding of the crystallography of metallic conductors in modern interconnect systems is essential if we are to understand the influence of processing parameters on performance and reliability. In particular we must be able to evaluat ...

Published: 7/1/2007
Authors: Stephanie A Hooker, Roy H. Geiss, Aparna Kar
Abstract: Carbon nanotubes have unique properties of interest for applications in aerospace, electronics, and biotechnology. However, the properties of different batches of carbon nanotubes can vary considerably depending on chemical purity and the nanotube ty ...

23. High Amplitude AC Tests of 300-nm Damascene Interconnect Structures
Published: 4/1/2007
Authors: David Thomas Read, Roy H. Geiss, Glenn Alers
Abstract: The AC fatigue test technique, which uses cyclic joule heating to apply thermal cycles to thin-film structures, was applied to copper lines and vias in damascene dielectric structures on silicon substrates. Specimen chips with two different types of ...

24. Need for Standardization of EBSD Measurements for Microstructural Characterization of Thin Film Structures
Published: 3/5/2007
Authors: Roy H. Geiss, David Thomas Read
Abstract: Microstructural characterization of metal thin films includes measurement of grain size, crystallographic texture and misorientation angle across grain boundaries. All of these measurements can be made simultaneously by the use of electron backscatte ...

25. Results of a Nanoindentation Round Robin on Thin Film Copper on Silicon
Published: 1/1/2007
Authors: David Thomas Read, Robert R Keller, Nicholas Barbosa, Roy H. Geiss
Abstract: Nanoindentation is used in a variety of fields to measure material hardness and elastic modulus. This test technique is especially attractive for thin films because of the difficulty of conducting tensile or other conventional mechanical characteriza ...

26. Strain-Induced Grain Growth during Rapid Thermal Cycling of Aluminum Interconnects
Published: 1/1/2007
Authors: Robert R Keller, Roy H. Geiss, Nicholas Barbosa, Andrew J Slifka, David Thomas Read
Abstract: We demonstrate by use of automated electron backscatter diffraction (EBSD) the rapid growth of grains in non-passivated, sputtered Al-1Si interconnects during 200 Hz thermal cycling induced by alternating electric current. Mean grain diameters were o ...

Published: 10/2/2006
Authors: Jens Mueller, Davor Balzar, Roy H. Geiss, David Thomas Read, Robert R Keller
Abstract: Texture in materials has a large influence on many properties of thin films; it is customarily determined by neutron or X-ray diffraction by measuring pole figures and evaluating orientation-distribution functions (ODF). X-ray diffraction (XRD) was t ...

28. Anisotropic elastic properties of nanocrystalline nickel thin films
Published: 5/1/2006
Authors: Donna C. Hurley, Roy H. Geiss, N Jennett, Malgorzata Kopycinska-Mueller, A Maxwell, Jens Mueller, David Thomas Read, J Wright
Abstract: As length scales continue to shrink, new tools are needed to measure mechanical properties. We are developing two such tools using different nondestructive acoustical techniques. Surface acoustic wave spectroscopy (SAWS) uses laser-ultrasonic methods ...

29. Size-related plasticity effects in AFM silicon cantilever tips
Published: 4/17/2006
Authors: Malgorzata Kopycinska-Mueller, Roy H. Geiss, Donna C. Hurley
Abstract: We are developing dynamic atomic force microscopy (AFM) techniques to determine nanoscale elastic properties. Atomic force acoustic microscopy (AFAM) makes use of the resonant frequencies of an AFM cantilever while its tip contacts the sample surface ...

30. Elastodynamic characterization of imprinted nanolines
Published: 4/3/2006
Authors: Ward L Johnson, Colm Flannery, Sudook A. Kim, Roy H. Geiss, Christopher L Soles, Paul R Heyliger
Abstract: Experimental techniques employing Brillouin light scattering (BLS) and analytical techniques employing finite-element (FE) and Farnell-Adler models are being developed for characterizing acoustic modes and determining elastic moduli and dimensions o ...

Search NIST-wide:

(Search abstract and keywords)

Last Name:
First Name:

Special Publications:

Looking for a NIST Special Publication (NIST SP Series)? Place the series number and dash in the report number field (Example: 800-) and begin your search.

  • SP 250-XX: Calibration Services
  • SP 260-XX: Standard Reference Materials
  • SP 300-XX: Precision Measurement and Calibration
  • SP 400-XX: Semiconductor Measurement Technology
  • SP 480-XX: Law Enforcement Technology
  • SP 500-XX: Computer Systems Technology
  • SP 700-XX: Industrial Measurement Series
  • SP 800-XX: Computer Security Series
  • SP 823-XX: Integrated Services Digital Network Series