 > Return to SRD 134, Index of Semiconductor Process Gases
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CHLORINE
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M.W. [1]
70.9054
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N.B.P [2]
239.12 K
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T.P [2]
172.12 K
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Cl2
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Pc [3]
7.71 MPa
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Tc [3]
417.15 K
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Vc[3]
0.124 m3/kmol
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Note: In the tables, #RED is used for properties obtained from estimation methods. *, †Other colors are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.
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T
K
|
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Vapor Pressure
kPa
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B(T)
cm3·mol-1
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dB/dT·T
cm3·mol-1
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C(T)
cm6·mol-2
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dC/dT·T
cm6·mol-2
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λ
mW/(m·K)
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η
µPa·s
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|
Estimated
Uncertainty
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1%
|
1%
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Gas densities are calculated to better than 0.1% over the temperature and pressure ranges of the reference.
|
5%
|
5%
|
|
Reference
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2
|
4
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5
|
5
|
5
|
5
|
6
|
7,8
|
|
240
|
3.94
|
105.14
|
-457.65
|
990.9
|
-53928
|
548995
|
16.8
|
10.8
|
|
250
|
3.97
|
159.80
|
-419.2
|
893.9
|
-34941
|
390113
|
17.3
|
11.2
|
|
260
|
4.00
|
234.33
|
-385.8
|
812.1
|
-21911
|
280192
|
17.8
|
11.7
|
|
270
|
4.03
|
333.02
|
-356.5
|
742.2
|
-12871
|
202823
|
18.3
|
12.2
|
|
280
|
4.05
|
460.43
|
-330.6
|
682.2
|
-6549
|
147542
|
18.7
|
12.6
|
|
290
|
4.07
|
621.30
|
-307.6
|
630.1
|
-2106
|
107524
|
19.2
|
13.1
|
|
300
|
4.09
|
820.54
|
-287.0
|
584.5
|
1020
|
78223
|
19.7
|
13.5
|
|
310
|
4.11
|
1063.14
|
-268.5
|
544.5
|
3214
|
56561
|
20.1
|
14.0
|
|
320
|
4.13
|
1354.20
|
-251.8
|
509.1
|
4742
|
40412
|
20.5
|
14.4
|
|
330
|
4.15
|
1698.86
|
-236.6
|
477.5
|
5791
|
28292
|
21.0
|
14.8
|
|
340
|
4.16
|
2102.36
|
-222.8
|
449.3
|
6494
|
19146
|
21.4
|
15.3
|
|
350
|
4.18
|
2569.99
|
-210.1
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423.9
|
6944
|
12216
|
21.8
|
15.7
|
|
360
|
4.19
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3107.13
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-198.5
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401.0
|
7211
|
6853
|
22.2
|
16.1
|
|
370
|
4.21
|
3719.29
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-187.8
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380.3
|
7345
|
2951
|
22.6
|
16.6
|
|
380
|
4.22
|
4412.14
|
-177.9
|
361.4
|
7381
|
-88
|
23.0
|
17.0
|
|
390
|
4.23
|
5191.52
|
-168.8
|
344.1
|
7348
|
-2390
|
23.4
|
17.4
|
|
400
|
4.24
|
6063.50
|
-160.3
|
328.3
|
7264
|
-4123
|
23.8
|
17.8
|
|
410
|
4.26
|
7034.44
|
-152.3
|
313.8
|
7146
|
-5415
|
24.2
|
18.2
|
|
420
|
4.27
|
-
|
-144.9
|
300.4
|
7003
|
-6365
|
24.6
|
18.7
|
|
430
|
4.28
|
-
|
-138.0
|
288.0
|
6845
|
-7049
|
24.9
|
19.1
|
|
440
|
4.28
|
-
|
-131.5
|
276.6
|
6677
|
-7526
|
25.3
|
19.5
|
|
450
|
4.29
|
-
|
-125.4
|
265.9
|
6504
|
-7839
|
25.7
|
19.9
|
|
460
|
4.30
|
-
|
-119.7
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256.0
|
6330
|
-8027
|
26.0
|
20.3
|
|
470
|
4.31
|
-
|
-114.3
|
246.7
|
6156
|
-8115
|
26.4
|
20.7
|
|
480
|
4.32
|
-
|
-109.2
|
238.0
|
5985
|
-8127
|
26.7
|
21.1
|
|
490
|
4.33
|
-
|
-104.4
|
229.9
|
5818
|
-8079
|
27.1
|
21.5
|
|
500
|
4.33
|
-
|
-99.8
|
222.3
|
5655
|
-7985
|
27.4
|
21.9
|
|
550
|
4.37
|
-
|
-80.2
|
190.4
|
4930
|
-7146
|
29.1
|
23.9
|
|
600
|
4.39
|
-
|
-64.7
|
166.0
|
4352
|
-6123
|
30.8
|
25.8
|
|
650
|
4.42
|
-
|
-52.2
|
146.9
|
3901
|
-5165
|
32.3
|
27.7
|
|
700
|
4.44
|
-
|
-41.9
|
131.5
|
3549
|
-4337
|
33.8
|
29.5
|
|
750
|
4.45
|
-
|
-33.3
|
118.9
|
3274
|
-3643
|
35.2
|
31.3
|
|
800
|
4.47
|
-
|
-26.0
|
108.4
|
3058
|
-3068
|
36.6
|
33.1
|
|
850
|
4.48
|
-
|
-19.7
|
99.4
|
2887
|
-2593
|
38.0
|
34.8
|
|
900
|
4.49
|
-
|
-14.2
|
91.8
|
2750
|
-2201
|
39.3
|
36.6
|
|
950
|
4.50
|
-
|
-9.4
|
85.2
|
2640
|
-1876
|
40.6
|
38.2
|
|
1000
|
4.51
|
-
|
-5.2
|
79.4
|
2551
|
-1606
|
41.9
|
39.9
|
References:
- IUPAC, "Atomic Weights of the Elements 1993," J. Phys. Chem. Ref. Data (1995, 24, 1561).
- "Selected Values of Properties of Chemical Compounds", Data Project; Thermodynamics Research Center, Texas A&M University, College Station, Texas (1980-extant. loose-leaf data sheets).
- Mathews, J.F., "The Critical Constants of Inorganic Substances", Chem. Rev. (1972, 72, 71).
- Stull, D.R., "Vapor Pressure of Pure Substances," Ind. Eng. Chem. (1947, 39, 517.)
- Hurly, J.J., unpublished results
- Powell, R.W., Liley, P.E., Ho, C.Y., "Thermal Conductivity of the Elements", J. Phys. Chem. Ref. Data (1972, 1, 279).
- Laby, T.H., Kaye, G.W.C., "Tables of Physical and Chemical Constants, 14th ed.", Longman Group, Limited, London (1973).
- Matheson Gas Data Book, unabridged ed., Matheson Company, Inc. East Rutherford, NJ (1974, 4 vols.)
Footnote:
#RED is used for properties obtained from estimation methods.
*BLUE, †ORANGE - Other colors are used to distinguish between differing data sets within a single column.
Contacts:
John Hurly
301-975-2476 Telephone
john.hurly@nist.gov
Keith Gillis
301-975-2468
keith.gillis@nist.gov
100 Bureau Drive, M/S 8360
Gaithersburg, MD 20899-8360
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