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Dimensional Metrology Group


The Dimensional Metrology Group in the Semiconductor & Dimensional Metrology Division of the Physical Measurement Laboratory (PML) at the National Institute of Standards and Technology (NIST) performs research to advance the state of the art of in all forms of coordinate dimensional metrology and develop methods to characterize the performance of both new and existing systems. It is critical that new technology be characterized to the degree that U.S. Industry will understand its capabilities, both strengths and weaknesses, and that accurate decisions to adopt new technology can be made. Our knowledge of advanced systems performance is used to actively support international and national dimensional metrology standards committees by our participation and leadership and with emphasis on rigorous uncertainty evaluation. We have a suite of coordinate measuring machines in environments that allow us to make the most accurate measurements available on critical parts, prototypes and fixtures. We also realize and disseminate the SI units of length, concentrate on dimensional measurements over seven orders of magnitude, from micrometers to several kilometers and provide the delivery of those measurements, standards and infrastructural technology services that promote U.S. innovation and industrial competitiveness.

Dimensional Metrology

Dimensional Measurement Services—The Dimensional Measurement Services (DMS) project enables innovation, commercialization, and global trade of U.S. products by providing a path for traceability to the SI unit of length, developing …

SI Length and Traceability—We maintain and develop methods to provide traceability to the meter via laser frequency/wavelength. The most significant source of uncertainty in most very high accuracy length measurements is the …

Advanced Dimensional Measurement Systems for Manufacturing—The Advanced Dimensional Measurement Systems for Manufacturing (ADMSM) project provides the measurement science and infrastructure needed by industry to adopt new dimensional measurement …

  • Dimensional Measurement Services provide industry with accurate and timely dimensional calibrations to enhance U.S. productivity and quality. To accomplish this objective, we have a carefully selected array of ongoing calibrations and a series of scheduled improvements for maintaining state-of-the-art dimensional metrology.

  • Moore M48 Coordinate Measuring Machine.

    Moore M48 Coordinate Measuring Machine.

    An array of high value products in medical, aerospace, automotive, energy, and biotechnology fields have small features that range from 10 µm to 1000 µm in size. To develop and provide the high accuracy metrology needed to measure these features, the EM group has recently deployed a second Moore M48 high accuracy CMM dedicated to microfeature calibrations that will provide accurate microfeature metrology with 100 nm or less uncertainty.

NACMA 2013 Annual Workshop and Conference

Physical Measurement Laboratory (PML)
Semiconductor & Dimensional Metrology Division

Dimensional Metrology Group (683.01)
Daniel S. Sawyer, Leader

General Information:
James R. Bowie, Secretary
301-975-3468 Telephone
301-869-5360 Facsimile

100 Bureau Drive, M/S 8211
Gaithersburg, Maryland 20899-8211