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Optical Technology Portal

Programs and Projects
Degradation of extreme-ultraviolet optics

Optical systems that operate at wavelengths in the ultraviolet (UV) and extreme-ultraviolet (EUV) are susceptible to degradation by a number of … more

Metrology for extreme ultraviolet lithography

Much of the activity of the UV Physics Group is aimed at supporting the R&D effort by the microelectronics industry to develop Extreme … more

Radiation Thermometry

Calibration standards for radiation thermometry are disseminated in the form of radiation thermometers, tungsten strip lamps and blackbodies. … more

Spectral responsivity measurement

NIST provides calibration of the spectral responsivity and spatial uniformity of photodetectors for use in industrial and government labs. These … more


The NIST Thermodynamic Metrology Group maintains and develops national standards of temperature (in the range 0.65 K to 1235 K), and supports … more

Theory of the optical properties of materials

The overarching objective of this project is reliably calculating the bulk optical properties of materials, such as complex index of refraction, … more

BMDO transfer radiometer (BXR)

NIST developed the BMDO transfer radiometer (BXR) to calibrate small-aperture blackbodies for the test facilities of the Missile Defense Agency … more

Advanced infrared radiometry and imaging

Radiation thermometers and blackbodies can be calibrated using a set of blackbodies. These blackbodies can vary in size and can be fixed-points of … more

Radiance temperature calibration laboratory

Radiance Temperature Calibration Laboratory is used for the calibration of radiation thermometers, tungsten-strip lamps and heat flux gauges. more

Synchrotron Ultraviolet Radiation Facility SURF III

The Synchrotron Ultraviolet Radiation Facility SURF III is operated by the Ultraviolet Radiation Group as a stable light source for radiometry and … more

Beamline 7:  EUV reflectometry

The NIST/DARPA EUV Reflectometry facility began in the late 1980's to make measurements of the reflectivity of EUV multilayer optics for … more

Beamline 1: Degradation of EUV filters and mirrors

Beamline 1 separates a swath of light from the synchrotron into two parts. The first part is collected in Beamline 1a by a normal-incidence … more

Modeled integrated scattering tool (MIST)

The MIST program has been developed to provide users with a general application to model an integrated scattering system. The program performs an … more


SCATMECH is an object-oriented C++ class library developed to distribute models for light scattering applications. Included in the library are … more

jb95 Spectral fitting program

A graphical user interface program, JB95 , based on a Windows 95 © API platform has been written in the C programming language to aid in the … more

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