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Nanofabrication, Nanomanufacturing, and Nanoprocessing Portal

Programs and Projects
Nano-Structured Optics and Optical Surface Metrology

Aspheric, free-form, and nano-structured surfaces are indispensable in high-performance optical systems. The ability to accurately manufacture … more

Dimensional Metrology for Nanofabrication

Our goal is to develop measurements that quantify the shape, size, orientation, and fidelity of nanoscale patterns as a platform to quantitatively … more

COMPLETED: Polymers for Next-Generation Lithography

Our goal is to develop measurement methods with sufficiently high spatial resolution to uncover the materials limitations in the resolution of … more

Metrology for Nanoimprint Lithography

Our goal is to develop, advance, and demonstrate measurements that facilitate Nanoimprint Lithography (NIL) as a viable technology for the … more

COMPLETED: Templated Assembly of Block Copolymer Films

Our goal is to develop critical measurement solutions that enable nanomanufacturing with template guided block copolymer assembly for next … more

Quantum Materials and Devices

Quantum coherent materials have become important in magnetic sensors as well as information processing technology. For magnetic sensors, … more

Instruments
Electronic Nanodevices Laboratory

We are developing measurement and fabrication capabilities for nanoscale characterization of electronic nanodevices relevant to energy transport, … more

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General Information:
301-975-NIST (6478) Telephone
inquiries@nist.gov Email

100 Bureau Drive
Gaithersburg, MD 20899-8110

Technical Contact:
Lloyd Whitman