Focused Ion Beam

The Nova NanoLab 600 (NNL600) is a Focused Ion Beam Scanning Electron Microscope equipped with spectroscopic detectors to allow elemental and phase measurements to be performed at high spatial resolution. The NNL600 operates between 1 keV and 30 keV electron beam energy and 2 kV and 30 kV ion beam accelerating voltage.  The NNL600 has a thermal (Schottky) field emission electron source and a Sidewinder ion column using a Ga+ liquid metal ion source. It can be used for TEM sample preparation; 3D Slice and View imaging, elemental, and phase analysis; nano-fabrication using electron and ion beam deposition; and conventional electron and ion beam imaging. The NNL600 is also equipped with removable STEM detector, cryo stage, nano manipulator, and multiple gas injection systems. 

* up to 30 keV electron beam energy
* up to 30 keV ion beam energy and 21 nA ion beam current
* 5-axis stage
* two silicon drift detectors (80 mm^2 & 30 mm^2)
* high resolution electron backscatter diffraction system
* cryo stage and sample preparation system
* nano-manipulator system for TEM sample prep
* scanning transmission electron microscopy detector
* Everhardt-Thornley detector, through-the-lens detector, CDEM detector

* nanofrabrication
* 2D & 3D phase, elemental, and morphological analysis
* TEM and Atom Probe sample preparation
* 2D & 3D cryo analysis of organic and polymeric samples
* nanostructure and nanoparticle imaging and analysis