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Programs and Projects
COMPLETED: Dimensional Metrology for Nanoscale Patterns

Our goal is to develop and demonstrate precise measurement methods that quantify the physical shape, critical dimensions (CD) and the structure of … more

Genomics of Electronic Materials

Our goal is to develop the metrology to enable a materials genomic approach to the discovery and optimization of complex electronic and … more

Magnetodynamics and Spin Electronics

The Magnetics Group's program in magnetodynamics and spin electronics develops new measurement techniques to characterize the high frequency … more

MEMS Measurement Science and Standards

Our goal is to provide technical leadership in R&D for the MEMS measurement infrastructure essential to improving U.S. economic … more

CMOS Device and Reliability

The CMOS Device and Reliability Project will develop advanced metrology tools to enable high performance CMOS (Complementary Metal Oxide … more

Nanoelectronic Device Metrology

The Nanoelectronic Device Metrology (NEDM) project is developing the measurement science infrastructure that will enable emerging “Beyond-CMOS” … more



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