NIST logo

Publication Citation: Microwave-Based Metrology Platform Development: Application of Broad-Band RF Metrology to Integrated Circuit Reliability Analyses

NIST Authors in Bold

Author(s): Lin You; Chukwudi A. Okoro; Jungjoon Ahn; Joseph J. Kopanski; Yaw S. Obeng;
Title: Microwave-Based Metrology Platform Development: Application of Broad-Band RF Metrology to Integrated Circuit Reliability Analyses
Published: May 12, 2014
Abstract: In this paper we describe the development of a suite of techniques, based on the application of high frequency electromagnetic waves, to probe material and structural changes in integrated circuits under various external perturbations. We discuss how these techniques has been leveraged to study the impact of thermal cycling on the thermo-mechanical reliability of Cu TSV-based interconnects in 3D-ICs. In addition, we demonstrate, with preliminary data, how Scanning Microwave Spectroscopy can be used to detect buried artifacts and characterize metallic contacts.
Conference: 225th Electrochemical Soceity
Proceedings: ECS Trasnsaction: Moore-Than-More 2
Location: Orlando, FL
Dates: May 4-9, 2014
Keywords: broadband, RF, emerging devices, nanoelectronics, 3D-IC, SMM
Research Areas: Microelectronics