Simmonds, R.
, Yu, P.
, Cicak, K.
, , N.
, Tsaturyan, Y.
, P., T.
and Regal, C.
(2014),
A phononic bandgap shield for high-Q membrane microresonators, Applied Physics Letters, [online], https://doi.org/10.1063/1.4862031
(Accessed April 19, 2024)
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A phononic bandgap shield for high-Q membrane microresonators
Published
Author(s)
, P.-L. Yu, , N. S. Kampel, Y. Tsaturyan, T. P. Purdy, C. A. Regal
Abstract
A phononic crystal can control the acoustic coupling between a resonator and its support structure. We micromachine a phononic bandgap shield for high Q silicon nitride membranes and study the driven displacement spectra of the membranes and their support structures. We find that inside the observed bandgaps, the density and amplitude of non-membrane modes are greatly suppressed, and membrane modes are shielded from an external mechanical drive by up to 30 dB.Citation
Applied Physics Letters
Volume
104
Issue
2
Pub Type
Journals
Download Paper
Keywords
nanomechanics, micromechanics, optomechanics
Citation
Created January 15, 2014, Updated November 10, 2018