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Publication Citation: A phononic bandgap shield for high-Q membrane microresonators

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Author(s): Raymond W. Simmonds; P.-L. Yu; Katarina Cicak; N. S. Kampel; Y. Tsaturyan; T. P. Purdy; C. A. Regal;
Title: A phononic bandgap shield for high-Q membrane microresonators
Published: January 15, 2014
Abstract: A phononic crystal can control the acoustic coupling between a resonator and its support structure. We micromachine a phononic bandgap shield for high Q silicon nitride membranes and study the driven displacement spectra of the membranes and their support structures. We find that inside the observed bandgaps, the density and amplitude of non-membrane modes are greatly suppressed, and membrane modes are shielded from an external mechanical drive by up to 30 dB.
Citation: Applied Physics Letters
Volume: 104
Issue: 2
Pages: 4 pp.
Keywords: nanomechanics, micromechanics, optomechanics
Research Areas: Nanomechanics, Microelectromechanical systems (MEMS)
DOI: http://dx.doi.org/10.1063/1.4862031  (Note: May link to a non-U.S. Government webpage)
PDF version: PDF Document Click here to retrieve PDF version of paper (2MB)