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|Author(s):||Raymond W. Simmonds; P.-L. Yu; Katarina Cicak; N. S. Kampel; Y. Tsaturyan; T. P. Purdy; C. A. Regal;|
|Title:||A phononic bandgap shield for high-Q membrane microresonators|
|Published:||January 15, 2014|
|Abstract:||A phononic crystal can control the acoustic coupling between a resonator and its support structure. We micromachine a phononic bandgap shield for high Q silicon nitride membranes and study the driven displacement spectra of the membranes and their support structures. We find that inside the observed bandgaps, the density and amplitude of non-membrane modes are greatly suppressed, and membrane modes are shielded from an external mechanical drive by up to 30 dB.|
|Citation:||Applied Physics Letters|
|Keywords:||nanomechanics, micromechanics, optomechanics|
|Research Areas:||Nanomechanics, Microelectromechanical systems (MEMS)|
|DOI:||http://dx.doi.org/10.1063/1.4862031 (Note: May link to a non-U.S. Government webpage)|
|PDF version:||Click here to retrieve PDF version of paper (2MB)|