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Publication Citation: Generalized Tabletop EUV Coherent Diffractive Imaging in a Transmission Geometry

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Author(s): Justin M. Shaw; Bosheng Zhang; Matthew Seaberg; Daniel Adams; Dennis Gardner; Elizabeth Shanblatt; Henry C. Kapteyn; Margaret M. Murnane;
Title: Generalized Tabletop EUV Coherent Diffractive Imaging in a Transmission Geometry
Published: September 11, 2013
Abstract: We demonstrate the first generalized tabletop EUV coherent microscope that can image extended, non-isolated, non-periodic, objects. By implementing keyhole coherent diffraction imaging with curved mirrors and a tabletop high harmonic source, we demonstrate a 5x increase in throughput of the imaging system, as well as more uniform illumination at the sample, compared with past work. Moreover, by using the unscattered light from a semi-transparent sample as a holographic reference wave, we show that the phase of the retrieved image yields quantitative information about the thickness of the sample. Finally, we show that excellent tabletop image fidelity is achieved by comparing the retrieved images with scanning electron and atomic force microscopy images, and show superior capabilities in some cases.
Citation: Nature Photonics
Volume: 21
Issue: 19
Pages: 11 pp.
Keywords: x-ray imaging;microscopy;high harmonic generation;lenless imaging;holography;nanostructures
Research Areas: Optics, Focused ion beam milling (FIB), Optical microscopy, Optical Scattering, UV Optical Metrology, Characterization, Nanometrology, and Nanoscale Measurements
PDF version: PDF Document Click here to retrieve PDF version of paper (6MB)