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Publication Citation: Method for Measuring Axis Orthogonality in MEMS Accelerometers

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Author(s): Craig D. McGray; Muhammad Y. Afridi; Jon C. Geist;
Title: Method for Measuring Axis Orthogonality in MEMS Accelerometers
Published: July 15, 2013
Abstract: A method is described for the computation of axis orthogonality errors in 3-axis accelerometers, based on the application of gravitational force at known angles. A precision two-axis articulated gimbal system is used to control the angle at which the gravitational force acts on the accelerometer, while accelerometry data are collected at each applied angle. The resulting data are fit to a multivariate polynomial, and the coefficients of the linear terms are used to calculate the direction of each axis of the accelerometer and the angle between each axis pair.
Citation: NIST Interagency/Internal Report (NISTIR) - 7925
Keywords: Accelerometer; MEMS; Orthogonality; Measurement; Calibration
Research Areas: Measurements
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