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NIST Authors in Bold
|Author(s):||Craig D. McGray; Muhammad Y. Afridi; Jon C. Geist;|
|Title:||Method for Measuring Axis Orthogonality in MEMS Accelerometers|
|Published:||July 15, 2013|
|Abstract:||A method is described for the computation of axis orthogonality errors in 3-axis accelerometers, based on the application of gravitational force at known angles. A precision two-axis articulated gimbal system is used to control the angle at which the gravitational force acts on the accelerometer, while accelerometry data are collected at each applied angle. The resulting data are fit to a multivariate polynomial, and the coefficients of the linear terms are used to calculate the direction of each axis of the accelerometer and the angle between each axis pair.|
|Citation:||NIST Interagency/Internal Report (NISTIR) - 7925|
|Keywords:||Accelerometer, MEMS, Orthogonality, Measurement, Calibration|
|PDF version:||Click here to retrieve PDF version of paper (305KB)|