Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Test Structure Fundamentals

Published

Author(s)

Richard A. Allen

Abstract

Test structures are critical tools for semiconductor manufacturers, allowing for understanding of the process and individual circuit elements that cannot be acquired from measurements of the circuits, which can have billions of transistors and other circuit elements. Using test structures, the manufacturer can measure parameters such as the dimensions of features and the performance of individual transistors, determine the variability of nominally identical transistors, and project the reliability of the circuit.

Citation

Allen, R. (2011), Test Structure Fundamentals (Accessed March 18, 2024)
Created April 4, 2011, Updated February 19, 2017