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NIST Authors in Bold
|Author(s):||Richard A. Allen;|
|Title:||Test Structure Fundamentals|
|Published:||April 04, 2011|
|Abstract:||Test structures are critical tools for semiconductor manufacturers, allowing for understanding of the process and individual circuit elements that cannot be acquired from measurements of the circuits, which can have billions of transistors and other circuit elements. Using test structures, the manufacturer can measure parameters such as the dimensions of features and the performance of individual transistors, determine the variability of nominally identical transistors, and project the reliability of the circuit.|
|Research Areas:||Process Metrologies|