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Publication Citation: Test Structure Fundamentals

NIST Authors in Bold

Author(s): Richard A. Allen;
Title: Test Structure Fundamentals
Published: April 04, 2011
Abstract: Test structures are critical tools for semiconductor manufacturers, allowing for understanding of the process and individual circuit elements that cannot be acquired from measurements of the circuits, which can have billions of transistors and other circuit elements. Using test structures, the manufacturer can measure parameters such as the dimensions of features and the performance of individual transistors, determine the variability of nominally identical transistors, and project the reliability of the circuit.
Pages: 30 pp.
Research Areas: Process Metrologies