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Publication Citation: A Low Cost Digital Vibration Meter

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Author(s): William V. Payne; Jon Geist;
Title: A Low Cost Digital Vibration Meter
Published: April 01, 2007
Abstract: This report describes the development of a low cost vibration amplitude sensor. The processes used to develop this sensor involve the use of Micro-Electronic and Mechanical Systems (MEMS) manufacturing techniques. The major mechanical element of the vibration sensor is the cantilever beam which is on the order of 500 m in length. Vibration of the MEMS device in the plane perpendicular to the cantilever beam causes flexing of the beam which produces changes in the resistance of a piezoresistor etched at the base of the beam (spring element). These changes in resistance (and thus voltage) along with a unique signal processing scheme are used to determine the acceleration amplitude of the MEMS device.
Citation: Journal of Research (NIST JRES) -
Volume: 112 No. 2
Pages: 14 pp.
Keywords: approximate root mean square;cantilever accelerometer;micro electro mechanical system;vibration meter
Research Areas: Building and Fire Research
PDF version: PDF Document Click here to retrieve PDF version of paper (3MB)