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|Author(s):||William V. Payne; Jon Geist;|
|Title:||A Low Cost Digital Vibration Meter|
|Published:||April 01, 2007|
|Abstract:||This report describes the development of a low cost vibration amplitude sensor. The processes used to develop this sensor involve the use of Micro-Electronic and Mechanical Systems (MEMS) manufacturing techniques. The major mechanical element of the vibration sensor is the cantilever beam which is on the order of 500 m in length. Vibration of the MEMS device in the plane perpendicular to the cantilever beam causes flexing of the beam which produces changes in the resistance of a piezoresistor etched at the base of the beam (spring element). These changes in resistance (and thus voltage) along with a unique signal processing scheme are used to determine the acceleration amplitude of the MEMS device.|
|Citation:||Journal of Research (NIST JRES) -|
|Volume:||112 No. 2|
|Keywords:||approximate root mean square,cantilever accelerometer,micro electro mechanical system,vibration meter|
|Research Areas:||Building and Fire Research|
|PDF version:||Click here to retrieve PDF version of paper (3MB)|