| Author(s): |
William V. Payne; Jon Geist; |
| Title: |
A Low Cost Digital Vibration Meter |
| Published: |
April 01, 2007 |
| Abstract: |
This report describes the development of a low cost vibration amplitude sensor. The processes used to develop this sensor involve the use of Micro-Electronic and Mechanical Systems (MEMS) manufacturing techniques. The major mechanical element of the vibration sensor is the cantilever beam which is on the order of 500 m in length. Vibration of the MEMS device in the plane perpendicular to the cantilever beam causes flexing of the beam which produces changes in the resistance of a piezoresistor etched at the base of the beam (spring element). These changes in resistance (and thus voltage) along with a unique signal processing scheme are used to determine the acceleration amplitude of the MEMS device. |
| Citation: |
Journal of Research (NIST JRES) - |
| Volume: |
112 No. 2 |
| Pages: |
14 pp. |
| Keywords: |
approximate root mean square;cantilever accelerometer;micro electro mechanical system;vibration meter |
| Research Areas: |
Building and Fire Research |
| PDF version: |
 Click here to retrieve PDF version of paper (3MB) |
