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Publication Citation: Mechanically Robust Spin-On Organosilicates Glasses for Nanoporous Applications

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Author(s): Hyun Wook Ro; K Char; Eun-Chae Jeon; H C. Kim; Dongil Kwon; Hae-Jeong Lee; J. H. Lee; Hee-Woo Rhee; Christopher L. Soles; Do Y. Yoon;
Title: Mechanically Robust Spin-On Organosilicates Glasses for Nanoporous Applications
Published: February 07, 2007
Abstract: An increasing number of technologies demand nanoporous materials with vastly improved physical, mechanical and thermal properties. This manuscript develops the microstructural basis for synthesizing organosilicate glasses (OSGs) with unprecedented thermal, mechanical, and physical properties. OSGs are traditionally synthesized by cross-linking alkyltrifunctionalsilanes (SiOxRH where R is an organic group) into a rigid glass. The critical insight is to bias this reaction to form small cyclic and cage type silsesquioxane precursors that remain soluble in the reaction solution and can later be covalently incorporated into the final cross-linked network.This is accomplished by copolymerizing methyltrimethoxysilane with an ethylene-bridged pair of trimethoxysilanes, leading to an unparalleled 6-fold increase in elastic modulus, a 4-fold increase in hardness, and 20-fold decrease of the thermal expansion coefficient. These vastly superior mechanical and thermal properties are discussed in the context of next generation semiconductor devices.
Citation: Advanced Materials
Volume: 19
Pages: pp. 705 - 710
Keywords: hardness,low-k dielectric,modulus,nanoindentation,organosilicate,porosity,thin film,x-ray porosimetry
Research Areas: Advanced Materials, Polymers, Semiconductor Materials, Materials Science
PDF version: PDF Document Click here to retrieve PDF version of paper (326KB)