NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.
Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.
An official website of the United States government
Here’s how you know
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Atomic Force Acoustic Microscopy Methods to Determine Thin-Film Elastic Properties
Published
Author(s)
Donna C. Hurley, K Shen, N Jennett, J Turner
Abstract
We discuss atomic force acoustic microscopy (AFAM) methods to determine quantitative values for the elasticproperties of thin films. The AFAM approach measures the frequencies of an AFM cantilever's first two flexural resonances while in contact with a material. The indentation modulus M of an unknown or test material can be obtained by comparing the resonant spectrum of the test material to that of a reference material. We examined a niobium film (d=280 30 nm) with AFAM using two separate reference materials and two different cantilever geometries. Data were analyzed by two methods: an analytical model based on conventional beam dynamics and a new finite element method that accommodated variable cantilever cross-section and viscous damping. AFAM values of M varied significantly depending on the specific experimental configuration and analysis technique. By averaging values obtained with both reference materials, very good agreement (5-10% difference) with values determined by other methods was achieved. These results provide insight into using AFAM methods to attain reliable, accurate measurements of elastic properties on the nanoscale.
Hurley, D.
, Shen, K.
, Jennett, N.
and Turner, J.
(2003),
Atomic Force Acoustic Microscopy Methods to Determine Thin-Film Elastic Properties, Journal of Applied Physics, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851331
(Accessed October 14, 2025)