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Publication Citation: Reference Material 8091: New Scanning Electron Microscope Sharpness Standard

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Author(s): Andras Vladar; Michael T. Postek; Nien F. Zhang; Robert D. Larrabee; Samuel N. Jones; Russell E. Hajdaj;
Title: Reference Material 8091: New Scanning Electron Microscope Sharpness Standard
Published: August 01, 2001
Abstract: All scanning electron microscope-based inspection instruments, whether they are in a laboratory or on the production line, slowly lose their performance and then the instrument is no longer capable of providing as good quality, sharp images as before. This loss of performance is related to changes in the electron source, in the alignment of the electron-optical column, astigmatism , and to sample and electron optical column contamination. Detecting a loss in image sharpness easily reveals this decrease of performance. Reference Material (RM) 8091 is intended primarily for routinely checking the performance of scanning electron microscopes. RM 8091 is designed for use in conjunction with Fourier analysis software like the NIST/SPECTER SEM Monitor Program, the NIST Kurtosis program, or the University of Tennessee SMART program. This RM is supplied as a small, approximately 2 mm ? 2 mm diced semiconductor chip. It is meant to be mounted on to a so-called drop-in wafer for specialized, wafer inspection or dimensional metrology SEMs or put on a specimen stub for insertion into laboratory scanning electron microscopes. This Reference Material is fully compatible with state-of-the-art integrated circuit technology.
Conference: Poster Session
Proceedings: Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XV, Neal T. Sullivan, Editor
Volume: 4344
Pages: pp. 827 - 834
Location: Santa Clara, CA
Dates: February 26, 2001
Keywords: CD;CD-SEM;measurement;metrology;performance;reference material;scanning electron microscope;SEM;standard
Research Areas: Metrology, Manufacturing