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Publication Citation: Pixel Based Absolute Topography Test for Three Flats

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Author(s): R E. Parks; Lianzhen Shao; Christopher J. Evans;
Title: Pixel Based Absolute Topography Test for Three Flats
Published: January 01, 1998
Abstract: We demonstrate a new method of performing the absolute three flat test using reflection symmetries of the surfaces and an algorithm for generating the rotation of arrays of pixel data. Most of the operations involve left/right and top/bottom flips of data arrays, operations that are very fast on most frame grabbers and are available on most commercial phase measuring interferometers. We demonstrate the method with simulated data as well as with actual data from 150 mm diameter surfaces that are flat to better than 25 nm peak-to-valley.
Citation: Applied Optics
Volume: 37(25)
Pages: pp. 5951 - 5956
Keywords: absolute testing;interferometry;optical testing;surface metrology;three-flat test
Research Areas: Metrology, Manufacturing