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Publication Citation: The Design of an Atomic Force Microscope for Metrology

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Author(s): T Mcwaid; J Schneir;
Title: The Design of an Atomic Force Microscope for Metrology
Published: January 01, 1994
Abstract: Atomic force microscope (AFM) is a rapidly evolving technique which has been used in numerous academic studies since its invention eight years ago. AFM manufacturers are now marketing instruments for industrial metrology applications. The National Institute of Standards and Technology (NIST) is developing a specially designed calibrated AFM (CAFM) system that will be capable of calibrating artifacts which, in turn, can be used to calibrate commercial AFMs. The need for calibration for the AFM community is first developed. The CAFM system design goals are then summarized. The critical electro-mechanical and metrology issues involved in the design, construction and operation of the CAFM are then discussed. Finally, the current status of the instrument is summarized, and preliminary measurements are presented.
Proceedings: Proceedings of ASPE
Pages: pp. 174 - 177
Location: Cincinnati, OH
Dates: October 2-7, 1994
Research Areas: Metrology, Manufacturing