| Author(s): |
Muhammad Y. Afridi; Christopher B. Montgomery; Elliott cooper-Balis; Stephen Semancik; Jon C. Geist; Alim A. Fatah; |
| Title: |
CMOS Microhotplate Technology for Chemical and Biological Agent Detection |
| Published: |
March 16, 2009 |
| Abstract: |
In this paper we describe microhotplates that can serve as platforms for gas sensors of potential use for homeland security and other gas sensing applications. A brief review of the fabrication of microhotplate precursors in a CMOS-compatible technology and the post-processing steps required to convert them into fully functional gas-sensors is presented. We show that polysilicon, which is commonly used as both a heater and a microhotplate temperature sensor, may not be suitable for the latter use at temperatures from ambient to around 450 °C. On the other hand, the microhotplate thermal efficiency characteristic may be a suitable temperature-sensor mechanism over this same temperature range |
| Conference: |
Chemical and Biological Defence Physical Science and Technology Conference 2008 Conference
(CBD PS&T 2008 Conference) |
| Proceedings: |
Defense Technical Information Center (DTIC) |
| Location: |
New Orleans, LA |
| Dates: |
November 17-21, 2008 |
| Keywords: |
CMOS; Microhotplate; Temperature Sensor; Calibration |
| Research Areas: |
Sensors |
