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Publication Citation: CMOS Microhotplate Technology for Chemical and Biological Agent Detection

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Author(s): Muhammad Y. Afridi; Christopher B. Montgomery; Elliott cooper-Balis; Stephen Semancik; Jon C. Geist; Alim A. Fatah;
Title: CMOS Microhotplate Technology for Chemical and Biological Agent Detection
Published: March 16, 2009
Abstract: In this paper we describe microhotplates that can serve as platforms for gas sensors of potential use for homeland security and other gas sensing applications. A brief review of the fabrication of microhotplate precursors in a CMOS-compatible technology and the post-processing steps required to convert them into fully functional gas-sensors is presented. We show that polysilicon, which is commonly used as both a heater and a microhotplate temperature sensor, may not be suitable for the latter use at temperatures from ambient to around 450 °C. On the other hand, the microhotplate thermal efficiency characteristic may be a suitable temperature-sensor mechanism over this same temperature range
Conference: Chemical and Biological Defence Physical Science and Technology Conference 2008 Conference (CBD PS&T 2008 Conference)
Proceedings: Defense Technical Information Center (DTIC)
Location: New Orleans, LA
Dates: November 17-21, 2008
Keywords: CMOS; Microhotplate; Temperature Sensor; Calibration
Research Areas: Sensors