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NIST Authors in Bold
|Author(s):||Muhammad Y. Afridi; Christopher B. Montgomery; Elliott cooper-Balis; Stephen Semancik; Jon C. Geist; Alim A. Fatah;|
|Title:||CMOS Microhotplate Technology for Chemical and Biological Agent Detection|
|Published:||March 16, 2009|
|Abstract:||In this paper we describe microhotplates that can serve as platforms for gas sensors of potential use for homeland security and other gas sensing applications. A brief review of the fabrication of microhotplate precursors in a CMOS-compatible technology and the post-processing steps required to convert them into fully functional gas-sensors is presented. We show that polysilicon, which is commonly used as both a heater and a microhotplate temperature sensor, may not be suitable for the latter use at temperatures from ambient to around 450 °C. On the other hand, the microhotplate thermal efficiency characteristic may be a suitable temperature-sensor mechanism over this same temperature range|
|Conference:||Chemical and Biological Defence Physical Science and Technology Conference 2008 Conference (CBD PS&T 2008 Conference)|
|Proceedings:||Defense Technical Information Center (DTIC)|
|Location:||New Orleans, LA|
|Dates:||November 17-21, 2008|
|Keywords:||CMOS, Microhotplate, Temperature Sensor, Calibration|