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|Author(s):||Dong-Hoon Min; Andrew McCallum; Stephen E. Russek; John M. Moreland;|
|Title:||Micromechanical torque magnetometer with sub-monolayer sensitivity|
|Published:||October 29, 2004|
|Abstract:||We have developed a micromechanical torque sensor with sub-monolayer sensitivity for in situ monitoring of the magnetic moment of thin films during deposition. The film is deposited onto a microcantilever. The torque on the film is determined by measuring the deflection of the cantilever due to a small AC magnetic field perpendicular to the surface of the film. The microcantilevers have a high mechanical quality factor, large surface area, low spring constant, and high resonance frequency to improve film sensitivity to thickness. A phase-locked loop minimizes the resonance frequency shift of the cantilever due to mass loading and temperature drift that would otherwise affect the measurement of magnetic torque. The demonstrated sensitivity for a Ni0.8Fe0.2 film and for a Ni0.8Fe0.2/Cu multilayer film is less than 0.1 nm.|
|Citation:||Journal of Magnetism and Magnetic Materials|
|Pages:||pp. 329 - 335|
|Keywords:||Cantilever,Fiber optic interferometer,Torque magnetometry,Ultra-high-vacuum|
|PDF version:||Click here to retrieve PDF version of paper (413KB)|