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Publication Citation: Progress Toward MMIC On-Wafer Standards

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Author(s): Dylan F. Williams; Roger Marks; K. R. Phillips; T. Miers;
Title: Progress Toward MMIC On-Wafer Standards
Published: November 01, 1990
Abstract: A prototype standard set in coplanar waveguide suitable for the calibration of wafer probe stations has been developed through a cooperative effort between the National Institute of Standards and Technology and a MIMIC Phase 3 team. The coplanar standard set is intended primarily for in-process testing, although the characterization of coplanar waveguide circuits is also possible. In this paper two sources of systematic errors associated with the prototype standard set, the propagation of undesirable modes, and the influence of adjacent structures on the electrical connection to the elements of the standard set, will be discussed.
Proceedings: Tech Dig., Auto. RF Tech. Group Conf.
Volume: 18
Pages: pp. 73 - 83
Location: Monterey, CA
Dates: November 29-30, 1990
Research Areas: Electromagnetics
DOI: http://dx.doi.org/10.1109/ARFTG.1990.323998  (Note: May link to a non-U.S. Government webpage)
PDF version: PDF Document Click here to retrieve PDF version of paper (783KB)