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|Author(s):||B. Peko; I. V. Dyakov; R. Champion; MVVS. Rao; James K. Olthoff;|
|Title:||Ion-Molecule Reactions and Ion Energies in CF4 Discharges|
|Published:||December 01, 1999|
|Abstract:||Absolute cross sections have been measured for reactants typically found in carbon tetrafluoride (CF4) discharges for collision energies below a few hundred electron volts. The reactions investigated include collision-induced dissociation and dissociative electron transfer reactions for CF3+ and F+ colliding with CF4, and collisional electron detachment for F- colliding with CF4. Also presented are measurements of energies and relative intensities of ions generated in dc Townsend CF4 discharges with E/N values ranging from 4 x 10-18 V m2 (4 to 25 kTd). Ion energy and ion intensity data for the Townsend discharges are analyzed in light of the measured cross sections.|
|Citation:||Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)|
|Pages:||pp. 7449 - 7456|
|Keywords:||CF4,collision induced dissociation,cross sections,dissociative charge transfer,ion energies,ion molecule reactions,Townsend discharge|
|Research Areas:||Electronics & Telecommunications|
|PDF version:||Click here to retrieve PDF version of paper (6MB)|