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Publication Citation: Ion-Molecule Reactions and Ion Energies in CF4 Discharges

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Author(s): B. Peko; I. V. Dyakov; R. Champion; MVVS. Rao; James K. Olthoff;
Title: Ion-Molecule Reactions and Ion Energies in CF4 Discharges
Published: December 01, 1999
Abstract: Absolute cross sections have been measured for reactants typically found in carbon tetrafluoride (CF4) discharges for collision energies below a few hundred electron volts. The reactions investigated include collision-induced dissociation and dissociative electron transfer reactions for CF3+ and F+ colliding with CF4, and collisional electron detachment for F- colliding with CF4. Also presented are measurements of energies and relative intensities of ions generated in dc Townsend CF4 discharges with E/N values ranging from 4 x 10-18 V m2 (4 to 25 kTd). Ion energy and ion intensity data for the Townsend discharges are analyzed in light of the measured cross sections.
Citation: Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)
Volume: 60
Issue: 6
Pages: pp. 7449 - 7456
Keywords: ;CF4;collision induced dissociation;cross sections;dissociative charge transfer;ion energies;ion molecule reactions;Townsend discharge;
Research Areas: Electronics & Telecommunications
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