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Aperture area measurements
Last Updated Date: 11/03/2011

Radiometric and photometric measurements require defining apertures. The accuracy to which these measurements can be accomplished requires … more

Advanced Linear and Nonlinear Optical Metrology in support of next-generation Lithography
Last Updated Date: 11/09/2010

High precision linear and nonlinear optics of next-generation lithographic techniques is measured and characterized to enable these technologies. more

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