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NIST on a Chip Patents

Photonic thermometer packages

Optical Temperature Sensor


Zeeshan Ahmed, Steve Semancik, Jacob M. Taylor, Jingyun Fan, Mohammad Hafezi, Haitan Xu, Gregory Strouse

The photonic temperature sensor relies on ultra-sensitive, frequency-based measurements of the effect of heat on the dimensions and predominant thermo-optic properties of the photonic resonator.
Schematic of magnetometer/gyroscope shows layers with photodetectors on top and laser at bottom.

Compact Atomic Magnetometer and Gyroscope


John Kitching, Elizabeth A. Donley, Eleanor Hodby, Andrei Shkel, Jesper Eklund

Gyroscopes sense rotation. In combination with magnetometers, gyroscopes are used many applications. The NIST invention enables multitasking measurement capabilities and is the first to demonstrate simultaneous measurement of rotation, rotation angle and acceleration with a single source of atoms.
Exploded schematic shows line drawings of five layers inside the optofluidic flow meter.

Optofluidic Flow Meter


Zeeshan Ahmed, Gregory A. Cooksey

The NIST optical flow meter uses a photonic sensor to detect pressure changes inside a microfluidic channel, which is then used to calculate volumetric flow rates. It provides on-chip assessment of flow and heat transfer resulting in improvement in fluid metrology and advances in biological sensing.
Prototype microchip device combining NIST's miniature atomic magnetometer with a fluid channel

Integrated Microchip Incorporating Atomic Magnetometer and Microfluidic Channel for NMR and MRI


Micah P. Ledbetter, Igor M. Savukov, Dmitry Budker, Vishal K. Shah, Svenja Knappe, John Kitching, David J. Michalak, Shoujun Xu, Alexander Pines

This technology is a device that integrates a microfluidic channel and an alkali vapor cell on a microchip-like platform. In conjunction with a near resonant laser beam, the alkali vapor cell forms the basis for an atomic magnetometer, competing with (or even exceeding) the sensitivity of magnetometers based on SQUIDs.
Diagram shows ethanol, shields, vapor cell, reservoir, heater.

Detection of J-Coupling Using Atomic Magnetometer


Micah P. Ledbetter, Charles W. Crawford, David E. Wemmer, Alexander Pines, Svenja Knappe, John Kitching, Dmitry Budker

NMR endures as one of the most powerful analytical tools for detecting chemical species and elucidating molecular structure. Zero-to-ultralow-field NMR spectroscopy is a new, potentially portable and cost-effective modality to determine the molecular structure and properties of microfluidic chemical samples.
A metal cube (RPPM) mounted on a metal surface has round holes cut in each side.

Optical Power Meter


John Lehman, Paul Williams, Robert Lee, Frank Maring

NIST scientists have devised a radically new method of determining laser power by measuring the radiation pressure exerted by a laser beam on a reflective surface.
A disk-shaped device is smaller than the half-dollar coin underneath it.

Smart Mirror


Alexandra Artusio-Glimpse, John Lehman, Michelle Stephens, Nathan Tomlin, Paul Williams, Ivan Ryger

This invention measures the power of a laser beam by detecting the displacement caused by photon pressure on a mirrored surface.
A flat pink device with a round black patch lies over a quarter.

Electrical-Substitution Radiometer


John H. Lehman, Nathan Tomlin

This invention is an electrical-substitution radiometer (ESR) — a thermal detector for optical and infrared radiation — based on a novel configuration of arrays of vertically aligned carbon nanotubes.
Fiber magnetometer

Chip-Scale Atomic Magnetometer


John Kitching, Svenja Knappe, Jan Preusser, Vladislav Gerginov, Micah Ledbetter, Igor Savukov, Dimitry Budker, Vishal Shah, David Michalak, Shoujun Xu, Alex Pines, Charles W. Crawford, David E. Wemmer, Leo Hollberg

Measurement of faint magnetic fields is critical to many applications, including medical diagnostics, but conventional technologies are often large, complex and expensive. NIST’s chip-scale atomic magnetometer is highly compact and readily fabricated using familiar semiconductor techniques.
Created July 1, 2020