Building a two degree-of-freedom (2 DOF) MEMS nanopositioner with decoupled X-Y motion has been a challenge in nanopositioner design. In this paper a novel design concept on making the decoupled motion of the MEMS nanopositioner is suggested. The suggested nanopositioner has two electrothermal actuators and employs a fully nested motion platform with suspended anchors. The suggested MEMS nanopositioner is capable of delivering displacement from the electrothermal actuator to the motion platform without coupled motion between the two X-Y axes. The design concept, finite element analysis (FEA) results, fabrication procedures and the performance of the 2 DOF nanopositioner is presented. In order to test the nanopositioner moving platform decoupled motion, one actuator moves the platform by 60 μm, while the other actuator is kept at the same position. The platform position cross talk error was measured to be less than 1 μm standard deviation.
Proceedings Title: ASME 2011 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference (IDETC/CIE 2011)
Conference Dates: August 29-31, 2011
Conference Location: Washington, DC
Pub Type: Conferences
Thermal Actuation, Nanopositioning, 2D Motion