We describe a new scanning electron microscope (SEM) method for obtaining and analyzing the crystallographic structure and orientation in nanoparticles and ultrathin films using conventional electron backscatter diffraction (EBSD) equipment.
Proceedings Title: Microscopy and Microanalysis 2010 Proceedings
Conference Dates: August 1-5, 2010
Conference Location: Portland, OR
Conference Title: Microscopy and Microanalysis 2010
Pub Type: Conferences
EBSD, SEM, nanoparticles, thin films, transmission electron diffraction