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Displaying 1 - 3 of 3

Detecting nanoscale contamination in semiconductor fabrication using through-focus scanning optical microscopy

August 28, 2020

Author(s)

Min-Ho Rim, Emil Agocs, Ronald G. Dixson, Premsagar P. Kavuri, Andras Vladar, Ravikiran Attota

Uniform Angular Illumination in Optical Microscopes

June 24, 2018

Author(s)

Ravikiran Attota, Emil Agocs

Enhancing optical microscopy illumination to enable quantitative imaging

March 18, 2018

Author(s)

Emil Agocs, Ravikiran Attota

There has been an increasing push to derive quantitative measurements using optical microscopes. While several aspects of microscopy have been identified to enhance quantitative imaging, non- uniform angular illumination asymmetry (ANILAS) across the field