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Search Publications by: Dale E. Newbury (Assoc)

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Displaying 26 - 50 of 112

Electron Microprobe Characterization of Si-Ge Alloys and Films for Use as Microanalysis Reference Materials

October 16, 2008
Author(s)
Ryna B. Marinenko, Shirley Turner, Dale E. Newbury, Robert L. Myklebust, Lee L. Yu, Rolf L. Zeisler, David S. Simons, John A. Small
Bulk SiGe wafers cut from single-crystal boules and SiGe thick films on Si wafers were evaluated with the electron probe microanalyzer for the extent of heterogeneity and composition for use as reference standards needed by the microelectronics industry in

Energy Dispersive Spectrometry

October 16, 2008
Author(s)
Dale E. Newbury
Energy dispersive x-ray spectrometry (EDS) is a spectral measurement tool used with a wide variety of excitation sources: electrons, ions and x-ray. Photon measurement is based on photoelectric absorption and conversion into charge. The process is serial

Quantitative Electron Probe Microanalysis of Rough Targets

October 16, 2008
Author(s)
Dale E. Newbury
Rough samples with topography on a scale that is much greater than the micrometer dimensions of the electron interaction volume present an extreme challenge to quantitative electron beam x-ray microanalysis with energy dispersive x-ray spectrometry

Electron Probe Microanalysis with Cryogenic Detectors

July 9, 2005
Author(s)
Dale E. Newbury, Kent D. Irwin, Gene C. Hilton, David A. Wollman, John A. Small, John M. Martinis
Electron probe x-ray microanalysis is based upon the use of a focused, high current density electron beam, 5 keV to 30 keV in energy, to excite characteristic x-rays from a picogram mass of a solid target. X-ray spectral measurements are currently

High Spatial Resolution Quantitative Electron Beam Microanalysis for Nanoscale Materials

March 21, 2005
Author(s)
Dale E. Newbury, J H. Scott, Scott A. Wight, J T. Armstrong, John A. Small
Transmission (TEM) and scanning electron microscopes (SEM) provide ideal platforms for electron and x-ray spectrometry to characterize nanoscale particles and nanostructured bulk materials. Electron spectrometry includes electron energy loss spectrometry

Electron Probe Microanalysis

January 1, 2005
Author(s)
Dale Newbury, Kent D. Irwin, Gene C. Hilton, David A. Wollman, John A. Small, John M. Martinis

Improving the Sensitivity of Electron Beam Microanalytical Techniques by Enhanced X-Ray Spectrometry: X-Ray Microcalorimetry, Silicon Drift Detector Energy Dispersive X-ray Spectrometry, and Polycapillary X-ray Optics

December 25, 2003
Author(s)
Dale E. Newbury
The microcalorimeter energy dispersive x-ray spectrometer, the silicon drift detector (SDD), and polycapillary x-ray optics are recent developments that have significantly advanced analytical x-ray spectrometry for electron beam instruments. The

A Well Dressed Microscope: Practical Experience with Microcalorimeter and Silicon Drift Detector Systems

December 31, 2002
Author(s)
John A. Small, Dale Newbury, John Henry J. Scott, L. King, Sae Woo Nam, Kent D. Irwin, Steven Deiker, Shaul Barkan, Jan Iwanczyk
NIST, Gaithersburg has recently installed a first generation silicon drift detector (SDD) from Photon Imaging and the NIST Boulder microcalorimeter energy dispersive x-ray spectrometer (υcal-EDS) on a JEOL 840 SEM, as shown in Fig. 1. [1,2] The instrument