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Displaying 32276 - 32300 of 74019

Fundamental Limits of Optical Critical Dimension Metrology: A Simulation Study

January 1, 2007
Author(s)
Richard M. Silver, Thomas A. Germer, Ravikiran Attota, Bryan M. Barnes, B Bunday, J Allgair, Egon Marx, Jay S. Jun
This paper is a comprehensive summary and analysis of a SEMATECH funded project to study the limits of optical critical dimension scatterometry. The project was focused on two primary elements: 1) the comparison, stability, and validity of industry models

Guide for the Selection of Chemical Detection Equipment for Emergency First Responders Guide 100–06, 3rd Edition

January 1, 2007
Author(s)
Alim A. Fatah, Richard Arcilesi, James Peterson, Charlotte H. Lattin, Corrie Y. Wells, Joseph A. McClintock
In recognizing the needs of State and local emergency first responders, the Law Enforcement Standards Office (OLES) at the National Institute of Standards and Technology (NIST), supported by the U.S. Department of Homeland Security (DHS), the Technical

Helium Ion Microscopy: A New Technique for Semiconductor Metrology and Nanotechnology

January 1, 2007
Author(s)
Michael T. Postek, Andras Vladar, John A. Kramar, L A. Stern, John Notte, Sean McVey
The Helium Ion Microscope (HIM) offers a new, potentially disruptive technique for nano-metrology. This methodology presents an approach to measurements for nanotechnology and nano-manufacturing which has several potential advantages over the traditional
Displaying 32276 - 32300 of 74019