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Displaying 46026 - 46050 of 74061

Nano-Lubrication: Concept and Design

January 1, 2001
Author(s)
Stephen M. Hsu
The advent of micro-electromechanical devices (MEMs), sensors, actuators, microsystems, and nanotechnology have called to attention the effect of friction on moving parts in nano/microdevices. To take full advantage of the opportunity to sense, compute

Neolithography Consortium: A Progress Report

January 1, 2001
Author(s)
James E. Potzick
The role of process simulation is becoming an increasingly important part of microlithography process control and photomask metrology as wafer feature sizes become smaller than the exposure wavelength, because the pattern transfer from photomask to wafer

New Developments in Deep Ultraviolet Laser Metrology for Photolithography

January 1, 2001
Author(s)
Marla L. Dowell, Christopher L. Cromer, Richard D. Jones, Darryl A. Keenan, Thomas Scott
Current and future laser measurement services at 157, 193, and 248 nm will be reviewed. Laser power and energy measurements at 193 nm will be presented, electrical calibration issues will be reviewed. We report an overall calibration uncertainty of laser

Newton's Rings in Near-Field Optics

January 1, 2001
Author(s)
Lori S. Goldner, Jeeseong Hwang, Garnett W. Bryant, Michael J. Fasolka, P Absil, J V. Hryniewicz, F G. Johnson, H Shen, P T. Ho
We show how Newton's rings manifest themselves in near-field scanning optical microscopy and discuss how this effect can be used with topographic imaging to measure correlated roughness of thin films. In conventional optics, transmission through a thin

NIST Centenial Sessions August Second Two Thousand and One

January 1, 2001
Author(s)
W Anderson, Dennis A. Swyt, H Semerjian
The National Conference of Standards Laboratories International was formed in forty years ago (as NCSL) to promote cooperative efforts for solving the common problems faced by measurement laboratories. The principal driver for its establishment was the

NIST Mechanisms for Disseminating Measurements

January 1, 2001
Author(s)
T E. Gills, S Dittmann, Georgia L. Harris, C S. Brickenkamp, J R. Rumble, N M. Trahey
The National Bureau of Standards, predecessor of the National Institute of Standards and Technology, began providing the Nation with measurement artifacts and instruments in 1901 when the Office of Weights and Measures became part of the fledgling
Displaying 46026 - 46050 of 74061