Kopanski, J.
, Marchiando, J.
and Lowney, J.
(1997),
Scanning Capacitance Microscopy Applied to 2D Dopant Profiling of Semiconductors, Proc., 3rd International Workshop on Expert Evaluation and Control of Compound Semiconductor Materials and Technologies, Freiburg, 1, GM
(Accessed April 20, 2024)
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Scanning Capacitance Microscopy Applied to 2D Dopant Profiling of Semiconductors
Published
Author(s)
, ,
Proceedings Title
Proc., 3rd International Workshop on Expert Evaluation and Control of Compound Semiconductor Materials and Technologies
Conference Dates
May 11-15, 1996
Conference Location
Freiburg, 1, GM
Pub Type
Conferences
Citation
Created December 30, 1997, Updated October 12, 2021