The NIST Microelectromechanical Systems (MEMS) 5-in-1 Reference Materials (RMs) were developed to assist users in validating their use of five documentary standard test methods. A Reference Material can be defined as a material whose property values are sufficiently homogeneous, stable, and well established such that the values can be used in the assessment of a measurement method. This paper presents the data that are used to characterize the RMs as homogeneous and stable.
Citation: ECS Transactions
Pub Type: Journals
homogeneous, MEMS 5-in-1, MEMS Calculator, Reference Material, RM 8096, RM 8097, stability, test chip