We present the basic operating principles of a traceable measurement system for use with scanned probe microscopes and nanometer-resolution displacement sensors. Our method is based upon a tunable external-cavity diode laser system which is Pound-Drever-Hall locked to a Fabry-Perot interferometer cavity with mechanical considerations taken for its use as a displacement metrology system. We discuss methods for making real-time measurements of the wide-bandwidth optical heterodyne signals our interferometer system produces. We report initial results using the system to examine known optical mixing errors in a heterodyne Michelson interferometer.
Citation: Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology
Pub Type: Journals
diode laser, Fabry-Perot interferometer, microwave frequency counter, nanometrology, optical heterodyne frequency measurement, optical mixing errors