We are developing metrology for rapid, quantitative assessment of elastic porperties with nanoscale spatial resolution. Atomic force acoustic microscopy (AFAM) methods enable modulus measurements at either a single point or as a map of local property variations. The information obtained furthers our understanding of nanopatterned surfaces, thin films, and nanoscale structures.
Citation: Advanced Engineering Materials
Pub Type: Journals
atomic force acoustic microscopy, atomic force microscopy, elastic properties, nanomechanics