The microelectronics industry supplies vital components to the electronics industry and to the U.S. economy, enabling rapid improvements in productivity and in new high technology growth industries such as electronic commerce and biotechnology. The National Institute of Standards & Technology (NIST), in fulfilling its mission of strenghtening the U.S. economy, works with industry to develop and apply technology, measurements and standards; and applies substantial efforts on behalf of the semiconductor industry and its infrastructure. This report describes the many projects being conducted at NIST and that constitute that effort.
Citation: NIST Interagency/Internal Report (NISTIR) - 7367
NIST Pub Series: NIST Interagency/Internal Report (NISTIR)
Pub Type: NIST PubsReport Number:
interconnect and packaging, lithography, microelectronics, semiconductor, thin film, wafer characterization