Watts, R.
, Ederer, D.
, Lucatorto, T.
and Isaacson, M.
(1991),
National Institute of Standards and Technology Metrology for Soft-X-Ray Multilayer Optics,, Optical Society of America, Washington, DC
(Accessed April 18, 2024)
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National Institute of Standards and Technology Metrology for Soft-X-Ray Multilayer Optics,
Published
Author(s)
, D L. Ederer, , M Isaacson
Citation
Soft X-Ray Projection Lithography Technical Digest Series
Publisher Info
Optical Society of America, Washington, DC
Pub Type
Books
Citation
Created January 1, 1991, Updated February 17, 2017