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PUBLICATIONS

Measurement Uncertainties in MEMS Kinematics by Super-Resolution Fluorescence Microscopy

Published

Author(s)

Craig D. McGray, Samuel M. Stavis, Jon C. Geist
Proceedings Title
Frontiers of Characterization and Metrology for Nanoelectronics
Conference Dates
March 25-28, 2013
Conference Location
Gaithersburg, MD
Pub Type
Conferences

Keywords

Uncertainty, Super-Resolution, Fluorescence Microscopy, Localization Precision, MEMS, Kinematics, Nanoscale, Nanometer
Nanometrology

Citation

McGray, C. , Stavis, S. and Geist, J. (2013), Measurement Uncertainties in MEMS Kinematics by Super-Resolution Fluorescence Microscopy, Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD (Accessed April 24, 2024)

Created March 25, 2013, Updated February 19, 2017