We measure the electrical parameters of commercial lumped-element impedance standards manufactured for the calibration of on-wafer probing systems. The standard's impedance depends not only on the standard itself, but also on probe placement, probe construction, and the reference calibration.
Proceedings Title: Tech Dig., Auto. RF Tech. Group Conf.
Conference Dates: June 7-12, 1998
Conference Location: Baltimore, MD
Pub Type: Conferences
electrical impedance standard, on-wafer calibration, wafer probes