One of the most important aspects of step height evaluation are the analysis algorithms used. There algorithms assume that the profiles and images being analyzed are ideal, but real step profiles are not ideal and the analysis algorithms can influence the results obtained. We explore some of the variations in results obtained when using three of the most common step height algorithms. Ways to reduced variability are outlined and disucssed.
Proceedings Title: Proceedings of Ninth International Conference on Metrology and Properties of Engineering Surfaces
Conference Dates: September 10-11, 2003
Conference Location: Halmstad, SW
Conference Title: Ninth International Conference on Metrology and Properties of Engineering Surfaces
Pub Type: Conferences
algorithms, profile distortion, step height